New way to overcome on the mirror effect for imaging the surface of insulator

Abstract

This work use the ion beam of a focused ion beam (FIB)/scanning electron microscope (SEM) microscope to investigate the ion mirror effect (IME) on the poly-methyl-methacrylate (PMMA). From study of parameter that influence the ion mirror effect (IME), we find easy and fast way to imaging the surface of the sample. To our knowledge this is the first observation of what can be called 'Imaging by Different Currents (IDC). This way is based on the measurement of the trapped charge as well as to evaluate the charge landing through imaging the ion mirror effect (IME) by using different currents (I sc) . We observed begin overcome on the mirror effect when and it allows to imaging the surface of insulator. This way (IDC) enables of imaging the surface of the sample in all the scanning potential of imaging (Vsc), all the scanning potential of irradiation (V i ) and also at any time radiation (t). Keywords -Anomalous contrast, Focused Ion Beam (FIB), Scanning Electron Microscope (SEM), ElectronMirror Effect (EME), Pseudo mirror Effect (PME), Ion Mirror Effect (IME) and Trapped charge.