In this article, we focus on resistance heating in miniaturized electronic devices, i.e., thermal sensors and thermal actuators. Such devices are transducers of energy, which involve thermal energy conversion on an intermediate stage. In such devices, heat dissipation is not an unwanted by‐product of the energy conversion process but constitutes the central mechanism that underlies device operation. Some industrially important kinds of such sensor and actuator devices are explained in more detail.
Introduction
Thermal Sensors and Actuators
Thermal Microstructures
Specific Sensor Applications
Specific actuator applications
Mathematical modeling of thermal microstructures