New surface morphology for low stress thin-film-coated thermal neutron detectors

McGregor, D.S.; Klann, R.T.; Gersch, H.K.; Ariesanti, E.; Sanders, J.D.; VanDerElzen, B.

doi:10.1109/nssmic.2001.1009304

Cited by 10 publications

(18 citation statements)

References 8 publications

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“…3 He has been the workhorse for thermal neutron detectors for the last 50 years; however, it is now in low supply due to increased usage [1]. In addition to the issue with material availability, solidstate thermal neutron detectors have additional advantages over the currently used 3 He gas-based technology in their inherent insensitivity to microphonics, low voltage operation and small device footprint. These recent developments have led to a variety of R&D projects on semiconductor-based thermal neutron detectors.…”

Section: Introductionmentioning

confidence: 99%

“…These recent developments have led to a variety of R&D projects on semiconductor-based thermal neutron detectors. Several different designs of solid-state thermal neutron detectors are currently being investigated [2][3][4][5][6]. Our design is based on a high-aspect-ratio Si PIN diode pillar arrays filled with 10 B, which we have coined the "Pillar Detector" [7][8][9][10][11][12][13][14][15][16].…”

Section: Introductionmentioning

confidence: 99%

“…Moving from a gas medium to a solid-state material can dramatically reduce the size of the device by increasing the density of the neutron-absorbing material, which is attractive for hand-held applications. A comparison of the primary detector figures-of-merit for our device (after appropriate scaling) and 3 He tubes is shown in Figure 1. This paper includes a review of the Pillar Detector design and the fabrication methods used, along with a discussion of alternate methods and the ultimate performance.…”

Section: Introductionmentioning

confidence: 99%

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Si pillar structured thermal neutron detectors: fabrication challenges and performance expectations

et al. 2011

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Solid-state thermal neutron detectors are desired to replace 3 He tube tube-based technology for the detection of special nuclear materials. 3He tubes have some issues with stability, sensitivity to microphonics and very recently, a shortage of 3 He. There are numerous solid-state approaches being investigated that utilize various architectures and material combinations. Our approach is based on the combination of high-aspect-ratio silicon PIN pillars, which are 2 µm wide with a 2 µm separation, arranged in a square matrix, and surrounded by 10 B, the neutron converter material. To date, our highest efficiency is ~ 20 % for a pillar height of 26 µm. An efficiency of greater than 50 % is predicted for our device, while maintaining high gamma rejection and low power operation once adequate device scaling is carried out. Estimated required pillar height to meet this goal is ~ 50 µm. The fabrication challenges related to 10 B deposition and etching as well as planarization of the three-dimensional structure is discussed.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Si pillar structured thermal neutron detectors: fabrication challenges and performance expectations

et al. 2011

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“…At the same time the 10 B film thickness of approximately 50 µm is needed to absorb the majority of the incoming thermal neutron flux. Fabrications of 10 B loaded semiconductors have also been reported using evaporation and powder filling [6]. To date, the ability to fill high aspect ratio structures with 10 B remains a challenge.…”

Section: Introductionmentioning

confidence: 99%

“…One approach involves the use of boron carbide [3]. Another approach utilizes 6 LiF as the neutron converter material [4]. The contradiction in scale lengths (3 µm versus 50 µm) is the hurdle to be overcome for producing high efficiency thermal neutron detectors using 10 B as the converter material.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Pillar-structured thermal neutron detectors

Nikolić

Conway

Reinhardt

et al. 2007

2007 IEEE Nuclear Science Symposium Conference Record

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Abstract-Pillar detector is an innovative solid state device structure that leverages advanced semiconductor fabrication technology to produce a device for thermal neutron detection. State-of-the-art thermal neutron detectors have shortcomings in achieving simultaneously high efficiency, low operating voltage while maintaining adequate fieldability performance. By using a 3-dimensional silicon PIN diode pillar array filled with isotopic boron 10, ( 10 B) a high efficiency device is theoretically possible. The fabricated pillar structures reported in this work are composed of 2 µm diameter silicon pillars with a 4 µm pitch and pillar heights of 6 and 12 µm. The pillar detector with a 12 µm height achieved a thermal neutron detection efficiency of 7.3% at 2V.

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