1985
DOI: 10.1109/tns.1985.4336870
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New Structure of Two-Dimensional Position Sensitive Semiconductor Detector and Application

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Cited by 23 publications
(3 citation statements)
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“…To improve the accuracy of the lateral displacement measurement, we adopted a pin‐cushion‐type PSD with low dark current. (S2044, Hamamatsu Photonics K.K., Shizuoka, Japan) [15]. The accuracy of the PSD in position sensing has been proved to be 0.6 µm by the manufacturer.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…To improve the accuracy of the lateral displacement measurement, we adopted a pin‐cushion‐type PSD with low dark current. (S2044, Hamamatsu Photonics K.K., Shizuoka, Japan) [15]. The accuracy of the PSD in position sensing has been proved to be 0.6 µm by the manufacturer.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…There are two pairs of output electrodes in a two-dimensional PSD – X-axis electrode pair and Y-axis electrode pair. The current produced at an electrode depends on the intensity and position of the centroid of the light striking the PSD [28]. With regards to an electrode pair, the electrode located nearer to the light centroid will produce more current than the other.…”
Section: System Descriptionmentioning
confidence: 99%
“…The measurement systems normally used, the positionsensitive detector (PSD) sensor [4,5] and the charge-coupled device (CCD) sensor [6], are unable to simultaneously satisfy the three requirements listed above. The PSD is a continuous structure.…”
Section: Introductionmentioning
confidence: 99%