A new large area UV photon detector with micro pattern gaseous detectors is developed and evaluated. A semitransparent CsI photocathode deposited on a MgF 2 window was combined with 10cm×10cm GEM and µPIC. Using Ar+C 2 H 6 (10%) gas, we achieved the gas gain of more than 10 5 which is enough to detect single photoelectron. We, then, irradiated vacuum UV photons (VUV, around 172nm) from the newly developed LaF 3 (Nd) scintillator to the detector and the single photoelectrons were successfully detected. We also demonstrated the imaging capability of the detector with µPIC readout systems.