2012
DOI: 10.2478/v10048-012-0012-y
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New Scatterometer for Spatial Distribution Measurements of Light Scattering from Materials

Abstract: A new scatterometer is composed of two ellipsoidal mirrors of revolution and an optical detection system. It enables us to absolutely measure diffuse reflectance and transmittance and to measure the spatial distribution of light scattering from almost all materials. The optical detection system has been developed both to measure total photo-intensity using a photodiode and to capture the imaging data using a CCD camera. This results in faster, more complete and often more accurate measurements than can be achi… Show more

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Cited by 8 publications
(4 citation statements)
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References 4 publications
(7 reference statements)
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“…-3 mol/L, 1.0×10 -2 mol/L) as the samples for the experiment were driving to the four channels, respectively, by the high voltage. [21][22]. While the sample moves to the detection point, the laser excites the fluorescence which is received by the CCD detection system.…”
Section: Host Applicationsmentioning
confidence: 99%
“…-3 mol/L, 1.0×10 -2 mol/L) as the samples for the experiment were driving to the four channels, respectively, by the high voltage. [21][22]. While the sample moves to the detection point, the laser excites the fluorescence which is received by the CCD detection system.…”
Section: Host Applicationsmentioning
confidence: 99%
“…This combination resolves the issue of a single, mobile detector in the gonioreflectometer, since in the case of IS the information is obtained simultaneously for each of the millions of camera pixels. As a first, the IS method was applied for determining the BSDF in the Parousiameter device patented by Philips [14]. The implementation of this patent was carried out by Radiant Imaging (Radiant Zemax from 2012); they constructed the commercial scatterometer IS-SA (Imaging Sphere for Scatter and Appearance measurements) device [15].…”
Section: Introductionmentioning
confidence: 99%
“…The optical approaches would be much better if they are unaffected by some environmental factors such as surface cover or light intensity. In this manuscript, unlike the present stylus or optical methods for surface topography inspections of materials [19][20][21][22][23][24][25][26][27], a new electromagnetic NDT&E methodology is provided on the basis of the accurate magnetic representation of surface topography. Corresponding relationships between wave features and surface topography are presented and the relevant evaluation system for testing surface topography (concave, bumped, and flat features) is built.…”
Section: Introductionmentioning
confidence: 99%