New Radius and Roundness Measurement for Microspheres Using a High-Precision Run-Out Error Separation Method

High-precision radius and sphericity measurement for microspheres of micro-CMM probe tip

“…Only the angle of the PMIs' measuring mirrors and the angular deflector need to be adjusted to measure different maximum or non-maximum circumferences, whereas the measurement principle can be the same. The previous measurement method [26] can still be used to obtain the radius of the different maximum circumferences, such as the equatorial circumference, as shown in figure 4.…”

“…For microspheres used as probe tips on micro-CMMs, the profiles should be measured as much as possible, particularly the areas used to contact workpieces. A measurement principle that can cover most surfaces of the microspheres is further proposed based on the previous roundness measurement method [26], as shown in figure 1. The red area is the measurable range of the maximum circumferences, whose maximum deflection angle (±β max ) can be calculated according to the diameter ratio of the microsphere and the rod, as shown as follows:…”

“…Currently, the internationally mature criteria for describing the form error of spherical components mainly focus on roundness, which is one of the most critical errors in evaluating spherical or circular profiles according to ISO 1101:2017 [18]. Aldous et al [19] and many other scholars [20][21][22][23][24][25][26] in the research field, as well as Mitutoyo Company and Taylor Company in business, have proposed and developed various roundness measuring methods and systems achieving several to tens of micrometers measurement accuracy and nanoscale repeatability. However, evaluating the profile of microspheres only by the roundness of one circumference is inaccurate, and the sphericity must be further measured and evaluated.…”

Single Infrared Spectrum Enables Simultaneous Identification of (Bio)Chemical Nature and Particle Size of Microorganisms and Synthetic Microplastic Beads

“…The identification of the average size of those microparticle population can help in their identification for diagnostic purposes. 11 Many methods have been used for the measurement of the size of microspheres, including the use of scanning probes, 12 analysis of light scattering, 13 miniaturized Michelson interferometers, 14,15 microfluidic chips, 16 and atomic force microscopes. 17 Attenuated total reflection (ATR)−Fourier Transform Infrared (FTIR) spectroscopy is a popular technique for the detection and identification of microorganisms, including pollen 18 and yeast, 19 where the mid-infrared (MIR) part of the optical spectrum is usually used as it contains the fundamental absorption lines of the spectral chemical signature of most materials.…”

“…The identification of the average size of those microparticle population can help in their identification for diagnostic purposes . Many methods have been used for the measurement of the size of microspheres, including the use of scanning probes, analysis of light scattering, miniaturized Michelson interferometers, , microfluidic chips, and atomic force microscopes …”