New possibilities with aberration-corrected electron microscopy

Abstract

Unlike light microscopy, where resolution is diffraction limited, the achievable resolution of electron microscopes is limited by lens aberrations so severe that the practical resolution is orders of magnitude worse than the diffraction limit. About 10 years ago, the first practical electron lens spherical aberration correctors were developed, and in the past decade, their performance, versatility and practical usefulness have been steadily improved. Commercial aberration-corrected instruments are available, and experiments previously deemed impossible are now being undertaken.