New piezoelectric actuator design for enhance the micropump flow

Haldkar, Rakesh Kumar; Khalatkar, Abhay; Gupta, Vijay; Sheorey, Tanuja

doi:10.1016/j.matpr.2020.10.702

Cited by 10 publications

(6 citation statements)

References 11 publications

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“…We have implemented the GA-based optimization method in MATLAB by using its genetic algorithm tool box (Version 2017) in order to enhance the vertical displacement amplitude of the layers. The applied fitness function and constraints of the optimization are defined by (22):…”

Section: Actuator Designmentioning

confidence: 99%

“…Harris et al 21 presented a multilayer PZT actuator and introduced a technique for replacing the conventional bonded bulk PZT transducer. Following them, Haldkar et al's 22 team conducted their work on multilayer strip piezoelectric bimorphs joined with silicone diaphragm, which improved performance compared to the circular PZT actuator. They claimed the new actuator could increase the flow rate by 12 times, with a lower applied voltage.…”

Section: Introductionmentioning

confidence: 99%

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Design and optimization of piezoelectric actuators for microflap-embedded micropumps

Parsi

Abouzarkhanifard

Zhang

2023

Advances in Mechanical Engineering

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In this paper, we propose a new method to use cost-effective multi-sheet off-the-shelf piezoelectric material (e.g. PZT) as an actuator for micropumps. Instead of one customized single PZT sheet that is typically expensive, multiple commercially available PZT sheets are utilized to decrease the cost of fabrication. For this purpose, we have derived analytic equations for expressing the natural frequency and mode shape of the actuator. The FEM simulations are utilized to verify the analytic equations. Thanks to their high accuracy, we can utilize the derived analytic equations as fitness functions of genetic algorithm (GA) for the optimization purpose of PZT physical aspects. Our experimental measurement results show that the GA is capable of optimizing multiple physical parameters of the piezoelectric actuator. Moreover, one-way compliant microflaps are presented for the first time to act as one-way valves for a PZT micropump aided by our proposed multi-sheet PZT actuator. The flow rate of this configuration is compared with a single-sheet PZT actuator in order to demonstrate the effect of the optimized PZT actuators in the practical applications of micropumps.

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Section: Actuator Designmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design and optimization of piezoelectric actuators for microflap-embedded micropumps

Parsi

Abouzarkhanifard

Zhang

2023

Advances in Mechanical Engineering

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“…Ma et al [31] proposed a multi chamber peristaltic pump with piezoelectric ceramic cantilever structure and integrated the pump with a microfluidic chip for fluid mixing and the results showed that the pump can transport fluid at the high resolution of 8.4 nL s −1 , the maximum flow rate of 102 nL s −1 and the back pressure of 2.0 kPa. Haldkar et al [32] researched a piezoelectric micropump with a novel strip piezo bimorph disc (SPBD) actuator. The research results showed that SPBD actuator has high deflection, so it can increase the flow rate of micropump.…”

Section: Introductionmentioning

confidence: 99%

A novel multi-channel silicon-based piezoelectric micropump with active piezoelectric valve array

Peng¹,

Wang²

2022

Smart Mater. Struct.

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In order to only use one piezoelectric micropump to simultaneously drive and control multi-channel flow fluids of complex microfluidic systems in biological, chemical and medical applications, and then improve the integration and reduce the size of systems, principle and structure of a multi-channel silicon-based piezoelectric micropump with active piezoelectric valve array are proposed and realized. The micropump is composed of one pumping unit and four active piezoelectric valves with annular boundaries, which form active piezoelectric valve array by uniformly distributing around pumping unit. All valves are connected to pumping unit by corresponding fluid channels and they can realize bidirectional fluid flowing. Therefore, pump can suck fluid from any one or more valves through pumping unit and can discharge fluid to the other one or more valves, which form its six working modes. Silicon-based pump body is processed by photoetching and the micropump is fabricated by fixing circular piezoelectric unimorph actuators on the silicon-based pump body. Flow rate model is established, the flow characteristics under each working mode are experimentally tested. Results show that the micropump can realize simultaneously multi-channel fluid input and output, when it works under three-in and single-out, it has the maximum flow rate and output pressure; the flow rate model can predict its flow rate, the maximum relative error between experimental test result and numerical simulation result is 9.99%; the micropump has high flow control accuracy, when amplitude of driving voltage varies from 35 V to 36 V with step of 0.1 V, it has the minimum change of flow rate of 1 μL/min, the maximum flow rate deviation of 5 μL/min and the maximum relative standard deviation of flow rate control of 0.175%. Therefore, the micropump provide feasible scheme for piezoelectric micropumps to be applied in complex microfluidic systems with multi-channel flow fluids, such as lab-on-chip.

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“…They usually have a large output force but a short working distance [17]. Conventional piezoelectric actuators include multilayer [18], tube [19], disk [20] and bender [21] types. In order to increase their working distance and achieve various motion types, piezoelectric benders can be combined with mechanical motion amplification systems [22].…”

Section: Introductionmentioning

confidence: 99%

Linear displacement and force characterisation of a 3D-printed flexure-based delta actuator

Chen

Kiziroglou

Yeatman

2022

Smart Mater. Struct.

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Piezoelectric beams provide a fast, high-force and scalable actuation mechanism that could offer precise motion control to medical microdevices including invasive micromanipulators, catheters and diagnosis tools. Their small displacement range can be addressed by motion amplification mechanisms. In this paper, a piezoelectric-actuated delta-robot actuator is proposed for probe-based confocal laser endomicroscopy (pCLE) microsystems. A prototype is designed and fabricated using three-dimensional (3D) polymer compound printing for a multi-flexure compliant motion amplifier and commercial piezoelectric beams. The flexure material is optimised for maximum linear output motion. The overall robot length is 76 mm and its maximum lateral dimension is 32 mm, with 10 g overall mass, including three piezoelectric beams. An axial motion control range of 0.70 mm and a maximum axial force of 20 mN are demonstrated, at 140 V actuation voltage. The proposed actuator architecture is promising for controlling lens, fibre and micromanipulator components for medical microrobotic applications.

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New piezoelectric actuator design for enhance the micropump flow

Cited by 10 publications

References 11 publications

Design and optimization of piezoelectric actuators for microflap-embedded micropumps

Design and optimization of piezoelectric actuators for microflap-embedded micropumps

A novel multi-channel silicon-based piezoelectric micropump with active piezoelectric valve array

Linear displacement and force characterisation of a 3D-printed flexure-based delta actuator

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