2000
DOI: 10.1016/s0026-2714(00)00123-2
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New non-destructive laser ablation based backside sample preparation method

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Cited by 10 publications
(2 citation statements)
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“…• A technique used for decapsulating the device for FA is the ultra-short-pulse laser-ablation-based backside sample-preparation method [21]. • A technique used for decapsulating the device for FA is the ultra-short-pulse laser-ablation-based backside sample-preparation method [21].…”
Section: Techniques Of Failure Analysismentioning
confidence: 99%
“…• A technique used for decapsulating the device for FA is the ultra-short-pulse laser-ablation-based backside sample-preparation method [21]. • A technique used for decapsulating the device for FA is the ultra-short-pulse laser-ablation-based backside sample-preparation method [21].…”
Section: Techniques Of Failure Analysismentioning
confidence: 99%
“…This is especially true for the newer VLSI packaging technologies, such as the chip size package (CSP) with a ball grid array (BGA) and the flip-chip package with the BGA or bumps. For the CSP and flipchip, backside sample preparation techniques [1][2][3][4][5] have been developed to localize failure sites from backside using contact-less methods, such as emission microscope, laser voltage probing (LVP) [6,7] and picosecond imaging circuit analysis (PICA) [8]. After localization of failure sites, physical analysis is necessary to identify the root cause of failures.…”
Section: Introductionmentioning
confidence: 99%