New methods for improved SRAM detection through scattered light collection

Barel, Reuven; Shachar, Keren; Bechler, Yakir; Horesh, Nir; Chiang, Hsien-Tsung; Chen, To-Yu

doi:10.1109/asmc.2011.5898182

2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference 2011

DOI: 10.1109/asmc.2011.5898182

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New methods for improved SRAM detection through scattered light collection

Reuven Barel

Keren Shachar

Yakir Bechler

et al.

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New methods for improved SRAM detection through scattered light collection

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