Abstract:This paper present a new approach for fabricating 3D micro structures based on the elevated structures. The new fabrication method involves combinations of several basic techniques, but a key enabling techniques for the successful development of the fabrication process is combining the photolithography with e-beam lithography processes to create 3-D structures
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.