New method for the deposition of thin films on the inner walls of a deep blind hole: Application to semiconductor doping

Maggioni, Gianluigi; Bertoldo, Stefano; Carraro, Chiara; Raniero, Walter; Sgarbossa, Francesco; Napolitani, Enrico; De Salvador, Davide

doi:10.1016/j.mssp.2024.108148

Materials Science in Semiconductor Processing

2024

DOI: 10.1016/j.mssp.2024.108148

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New method for the deposition of thin films on the inner walls of a deep blind hole: Application to semiconductor doping

Gianluigi Maggioni,

Stefano Bertoldo,

Chiara Carraro

et al.

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New method for the deposition of thin films on the inner walls of a deep blind hole: Application to semiconductor doping

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References 24 publications

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