This paper focuses on developing Ti-SiO x nanoparticles and evaluating their self-propagating exothermic function. In combination with an atomized heating method, molten salt reduction, and sputtering, we established a fabrication technique for Ti-SiO x nanoparticles in which their exothermic characteristics can be designed. In the atomized heating method, porous SiO x nanoparticles with various spherical shapes, sizes, and porosities were fabricated. Porous SiO x nanoparticles with uniformly arranged pores were produced at a polystyrene latex (PSL) concentration of approximately 3.0 wt%. Reduction of the oxygen content of the porous SiO x nanoparticles was conducted using molten salt. Ti was deposited onto the entire surface by stirring and sputtering. The completed 1.0 mg of Ti-SiO x nanoparticle powder exhibited a self-propagating exothermic reaction by applying an electric spark. The relationship between PSL concentration and heat generation characteristics, such as the maximum temperature, time to reach maximum temperature, and duration of the exothermic reaction, was investigated.