New integrated full-range MEMS speaker for in-ear applications

Stoppel, F.; Männchen, Andreas; Niekiel, Florian; Beer, Daniel; Giese, Thorsten; Wagner, Bernhard

doi:10.1109/memsys.2018.8346744

Cited by 43 publications

(39 citation statements)

References 8 publications

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“…In 2018, Stoppel et al demonstrated a piezoelectric MEMS speaker based on a 2-μm-thick sputtered PZT with two open cuts on a square diaphragm (4 × 4 mm 2 ) for in-ear applications, as shown in Figure 8 a [ 18 ]. Without a closed diaphragm, four individual actuators are mechanically decoupled from each other and thus can achieve larger out-of-plane displacements.…”

Section: Development Of Mems Speakersmentioning

confidence: 99%

“… Optical images of piezoelectric MEMS speakers with novel structural designs. ( a ) A diaphragm with two open cuts (Reproduced with permission from IEEE [ 18 ]). ( b ) A diaphragm with suspension-spring actuators (Reproduced with permission from Elsevier [ 21 ]).…”

Section: Figurementioning

confidence: 99%

“… Measured frequency response of piezoelectric MEMS speakers with ( a ) a thin ceramic PZT-based diaphragm in free field at 1 cm (Reproduced with permission from Elsevier [ 16 ]), ( b ) a square diaphragm with open cuts in an ear simulator (Reproduced with permission from IEEE [ 18 ]), and ( c ) dual-curve spring actuators in a 3-cm-long tube (Reproduced with permission from Elsevier [ 21 ]). …”

Section: Figurementioning

confidence: 99%

“…To date, MEMS speakers have been developed mainly for in-ear applications (e.g., hearing aids) and headphones [ 15 , 18 ]. It is challenging for MEMS speakers and conventional electrodynamic microspeakers as well to achieve both high SPL output and flat audio frequency response due to the vibration mode complexity of the diaphragm and the limited space for actuation.…”

Section: Introductionmentioning

confidence: 99%

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Review of Recent Development of MEMS Speakers

Wang

Zheng

et al. 2021

Micromachines

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Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or microspeakers have been rapidly developed during the past decade to meet the requirements of the flourishing audio market. With advantages of a small footprint, low cost, and easy assembly, MEMS speakers are drawing extensive attention for potential applications in hearing instruments, portable electronics, and the Internet of Things (IoT). MEMS speakers based on different transduction mechanisms, including piezoelectric, electrodynamic, electrostatic, and thermoacoustic actuation, have been developed and significant progresses have been made in commercialization in the last few years. In this article, the principle and modeling of each MEMS speaker type is briefly introduced first. Then, the development of MEMS speakers is reviewed with key specifications of state-of-the-art MEMS speakers summarized. The advantages and challenges of all four types of MEMS speakers are compared and discussed. New approaches to improve sound pressure levels (SPLs) of MEMS speakers are also proposed. Finally, the remaining challenges and outlook of MEMS speakers are given.

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Section: Development Of Mems Speakersmentioning

confidence: 99%

Section: Figurementioning

confidence: 99%

Section: Figurementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Review of Recent Development of MEMS Speakers

Wang

Zheng

et al. 2021

Micromachines

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“…It has to be mentioned that due to the limitations regarding the maximum displacement of an electrostatic speaker caused by the so called snap-in effect, the maximum sound pressure is limited by the underlying actuator principle. Using a piezoelectric device would greatly enhance the maximum stroke level and therefore the achievable sound pressure [15].…”

Section: In Ear Applicationmentioning

confidence: 99%

Investigation of a new method for sound generation – Advanced Digital Sound Reconstruction

Mayrhofer¹

2021

Elektrotech. Inftech.

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The current loudspeaker market has a high demand for portable audio devices. Hence, the miniaturization of loudspeakers (microspeakers) is of great importance for manufacturers. Traditional loudspeakers – for example the electrodynamic loudspeaker – are the forerunners, but so-called MEMS loudspeakers (Micro-Electro-Mechanical-System) have emerged recently. MEMS devices have already been used for sensors (i.e., microphones) to a great extend due to their advantages regarding form factor and production efficiency. Albeit additional challenges for actuators like moving enough air with a microstructure – as it is the case for a loudspeaker – the usage of MEMS technology for loudspeakers is very attractive.Since especially low-frequency audio signals often pose problems for microspeakers, this article focuses on a new sound generation technique called Advanced Digital Sound Reconstruction (ADSR) which is especially well-suited for low-frequency audio signals since ADSR can generate more volume displacement relative to its size. Based on a general description of the principle, an outlook of the possibilities regarding achievable sound pressure compared to the classical excitation scheme is derived. Furthermore, measurements are presented, which aim to prove the concept of ADSR based on already existing actuators.

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