New Heteroleptic Germanium Precursors for GeO2 Thin Films by Atomic Layer Deposition
Heenang Choi,
Chanwoo Park,
Sung Kwang Lee
et al.
Abstract:This study describes the synthesis of 12 new germanium complexes containing β-diketonate and/or N-alkoxy carboxamidate-type ligands as precursors for GeO 2 through atomic layer deposition (ALD). A series of Ge(β-diketonate)Cl complexes such as Ge(acac)Cl (1) and Ge(tmhd)Cl (2) were synthesized by using acetylacetone (acacH) and 2,2,6,6-tetramethyl-3,5-heptanedione (tmhdH). N-Alkoxy carboxamidate-type ligands such as N-methoxypropanamide (mpaH), N-methoxy-2,2dimethylpropanamide (mdpaH), N-ethoxy-2-methylpropana… Show more
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