New electroforming technology pressure aid for LIGA process

Tsai, Tzung‐Jiun; Yang, Hsiharng; Chein, Reiyu

doi:10.1007/s00542-004-0425-0

Cited by 21 publications

(16 citation statements)

References 9 publications

(4 reference statements)

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“…The surface morphology of the pressurized electroformed mold is improved compared with the conventional method. Furthermore, the deposited nickel hardness is increased by about 20%, when the electrolyte pressure is increased to 3.25 kg cm −2 [12]. The electrolyte pressure is set at 4 kg cm −2 in this research.…”

Section: Experiments Structure and Resultsmentioning

confidence: 95%

“…A new micro-electroforming technique using air-pressure assistance in the electrolyte is used in this work [12]. The pressurized electrolyte reduces hydrogen bubble formation and defect on the electroforming surface.…”

Section: Experiments Structure and Resultsmentioning

confidence: 99%

“…They showed the possibility of using the molded lens for applications such as data storage and optical communications. Tsai et al [12] found that the surface morphology of pressurized electroformed samples was improved compared with the conventional method. They show that the pressurized electrolyte in the electroforming process can increase the allowable applied current density and reduce the metallurgical grain size.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of a microlens array electroformed mold with low roughness and high hardness

Lin¹,

Hung²,

Yang³

et al. 2007

J. Micromech. Microeng.

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A systematic approach to achieve a LRHH (low roughness and high hardness) electroforming process is developed in this study. Because electroformed molds with low roughness and high hardness are required for microlens array fabrication using the LIGA-like process, the invented Ni–Co alloy-pressurized electroforming process is used to fabricate a metallic micro-mold for microlens array molding. The electrolyte parameters such as Co content, current density, brightener content, pH value and temperature will be examined with respect to roughness and hardness. An artificial neural network (ANN) is used to construct a system model that accurately predicts the responses for arbitrary parameter settings. A genetic algorithm (GA) is applied to minimize the surface roughness and improve the micro-mold hardness. The results show that the micro-mold surface roughness and hardness could be significantly improved using the ANN/GA approach. A LRHH electroforming process is carried out using parameter design to improve the surface morphology and increase the service life of the micro-mold during the forming process.

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Section: Experiments Structure and Resultsmentioning

confidence: 95%

Section: Experiments Structure and Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Fabrication of a microlens array electroformed mold with low roughness and high hardness

Lin¹,

Hung²,

Yang³

et al. 2007

J. Micromech. Microeng.

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show abstract

“…Not until more than 100 years later, i.e. after 1950, was electroforming used extensively in the industry [13]. In addition to making printing plates, plastic forming/moulding moulds, screens, and many other products, electroforming was also used to manufacture individual parts, which were usually difficult to manufacture using conventional machining [14].…”

Section: Studies Before the 2000smentioning

confidence: 99%

“…Controlling deposition uniformity is vital when electroforming micro/nanostructures. Many methods are discussed in the literature to improve the uniform thickness of a deposit, including using (1) pulse reverse current [83]; (2) rotated and moving cathodes [25]; (3) a second cathode [84]; (4) ultrasonic and air-pressure agitation [13,85]; (5) an insulating shield [86]; (6) an auxiliary anode [87]; (7) controlling the size, shape, and placement of the anode [88]; (8) adjusting electrolyte composites [89]; and (9) optimizing process parameters [90].…”

Section: Thickness Uniformitymentioning

confidence: 99%

Advances in precision micro/nano-electroforming: a state-of-the-art review

Zhang

Gilchrist

2020

J. Micromech. Microeng.

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Micro/nano-electroforming has received considerable interest from various industry sectors as an advanced micro-manufacturing technique that offers high dimensional precision and replication accuracy. When tight feature tolerances and miniaturized geometries are required, electroforming provides unique advantages and cost-effective characteristics for fabrication. This paper firstly reviews the historical development of micro-electroforming, particularly within the past two decades. The fundamentals of electroforming and relevant applications are firstly discussed, and the common requirements are then proposed. Based on these requirements, we have focused on the processes of micro-electroforming from the ultraviolet lithography, electroplating, and moulding process to electroforming process characterization and optimization, bath compositions, agitation, and some hybrid processes. Progress from electrochemical micro/nano-manufacturing processes, such as 3D printing by electrodeposition and electrochemical wet stamping, is also included. The eventual nanocomposite electroforming is highlighted from the perspectives of the formation mechanism, deposition properties and relevant applications. Finally, a conclusion and future perspectives are presented. This review will demonstrate how the micro/nano-electroforming process can be further developed to meet the requirements of new product development from precision optics, micro/nano-moulding, high-performance coatings and future micro/nano-manufacturing.

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High-aspect-ratio microstructural posts electroforming modeling and fabrication in LIGA process

et al. 2005

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This paper describes a theoretical model that predicts the metal ion concentration distribution during electroforming high aspect ratio microstructures (HARM). The applied current density and microstructure aspect ratio were found as two important factors that affect the electroforming outcome. The analytical results are verified using experiments that electroforming microstructural posts with an aspect ratio of 10. Good agreement was obtained between the experimental and analytical solutions. Based on the ion concentration analytical prediction on the cathode surface, one can estimate the electroforming time required for fabricating a microstructure for a given aspect ratio

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New electroforming technology pressure aid for LIGA process

Cited by 21 publications

References 9 publications

Fabrication of a microlens array electroformed mold with low roughness and high hardness

Fabrication of a microlens array electroformed mold with low roughness and high hardness

Advances in precision micro/nano-electroforming: a state-of-the-art review

High-aspect-ratio microstructural posts electroforming modeling and fabrication in LIGA process

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