New diamond nanofabrication process for hard x-ray zone plates

Uhlén, Fredrik; Lindqvist, Sandra; Nilsson, Daniel; Reinspach, Julia; Vogt, Ulrich; Hertz, Hans M.; Holmberg, Anders; Barrett, R.

doi:10.1116/1.3656055

Cited by 16 publications

(12 citation statements)

References 14 publications

(18 reference statements)

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“…As a last step the chromium layer was removed. The fabrication process is identical to that described in [11], except that the diamond etch step was omitted here. The resulting gratings had a period of 200 nm, a thickness of approximately 350 nm and a size of 200 µm × 200 µm.…”

Section: Fabrication Of Tungsten Nanostructures and Zone Platesmentioning

confidence: 99%

Thermal stability of tungsten zone plates for focusing hard x-ray free-electron laser radiation

et al. 2012

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Diffractive Fresnel zone plates made of tungsten show great promise for focusing hard x-ray free-electron laser (XFEL) radiation to very small spot sizes. However, they have to withstand the high-intensity pulses of the beam without being damaged. This might be problematic since each XFEL pulse will create a significant temperature increase in the zone plate nanostructures and it is therefore crucial that the optics are thermally stable, even for a large number of pulses. Here we have studied the thermal stability of tungsten zone-platelike nanostructures on diamond substrates using a pulsed Nd:YAG laser which creates temperature profiles similar to those expected from XFEL pulses. We found that the structures remained intact up to a laser fluence of 100 mJ cm −2 , corresponding to a 6 keV x-ray fluence of 590 mJ cm −2 , which is above typical fluence levels in an unfocused XFEL beam. We have also performed an initial damage experiment at the LCLS hard XFEL facility at SLAC National Accelerator Laboratory, where a tungsten zone plate on a diamond substrate was exposed to 10 5 pulses of 6 keV x-rays with a pulse fluence of 350 mJ cm −2 without any damage occurring.

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Section: Fabrication Of Tungsten Nanostructures and Zone Platesmentioning

confidence: 99%

Thermal stability of tungsten zone plates for focusing hard x-ray free-electron laser radiation

et al. 2012

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“…The Ronchi grating was made of diamond [8] and had a thickness of 1.5 μm with an additional layer of 250 nm tungsten on top, giving a first-order diffraction efficiency of roughly 13%. A grating period of 200 nm matches the numerical aperture of the focusing zone plate, ensuring optimum overlap of the zeroth and first orders as in Fig.…”

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confidence: 99%

Ronchi test for characterization of nanofocusing optics at a hard x-ray free-electron laser

et al. 2012

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We demonstrate the use of the classical Ronchi test to characterize aberrations in focusing optics at a hard x-ray free-electron laser. A grating is placed close to the focus and the interference between the different orders after the grating is observed in the far field. Any aberrations in the beam or the optics will distort the interference fringes. The method is simple to implement and can provide single-shot information about the focusing quality. We used the Ronchi test to measure the aberrations in a nanofocusing Fresnel zone plate at the Linac Coherent Light Source at 8.194 keV.

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“…Current methods used to produce X-ray diffractive optics include top-down methods involving patterning of a thick resist mould 6,7 , pattern transfer into a substrate using deep reactive ion etching [8][9][10] , anisotropic Si wet etch 11,12 , multiple patterning techniques 13 , multilayer Laue lens, various multilayer-sliced zone plate techniques 14 , lithographic stacking 15 and mechanical stacking 16 . Advantages and tradeoffs exist with each method.…”

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confidence: 99%

Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics

2014

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Although diffractive optics have played a major role in nanoscale soft X-ray imaging, highresolution and high-efficiency diffractive optics have largely been unavailable for hard X-rays where many scientific, technological and biomedical applications exist. This is owing to the long-standing challenge of fabricating ultra-high aspect ratio high-resolution dense nanostructures. Here we report significant progress in ultra-high aspect ratio nanofabrication of high-resolution, dense silicon nanostructures using vertical directionality controlled metalassisted chemical etching. The resulting structures have very smooth sidewalls and can be used to pattern arbitrary features, not limited to linear or circular. We focus on the application of X-ray zone plate fabrication for high-efficiency, high-resolution diffractive optics, and demonstrate the process with linear, circular, and spiral zone plates. X-ray measurements demonstrate high efficiency in the critical outer layers. This method has broad applications including patterning for thermoelectric materials, battery anodes and sensors among others.

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New diamond nanofabrication process for hard x-ray zone plates

Cited by 16 publications

References 14 publications

Thermal stability of tungsten zone plates for focusing hard x-ray free-electron laser radiation

Thermal stability of tungsten zone plates for focusing hard x-ray free-electron laser radiation

Ronchi test for characterization of nanofocusing optics at a hard x-ray free-electron laser

Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics

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