“…3 mm thick float glass substrates with a size of 100 mm by 100 mm from different stages of the R&D pilot line process of AVANCIS [18] were used (see Figure 1). The P1 front side and back side structuring experiments to achieve a galvanic separation of the p-contact were performed on Mo-films.…”
Section: Samples and Process Requirementsmentioning
We report on the selective structuring of CIS (Cu(In,Ga)(S,Se) 2 ) thin film solar cells applying picosecond lasers at 1064 nm. For a monolithic serial interconnection the thin layers are selectively separated by so called laser patterns 1, 2 and 3 (P1, P2 and P3). We demonstrate that the half micron thick molybdenum back electrode can be structured with a P1 process speed of more than 4 m/s without detectable residues and damages by direct induced laser ablation from the back side. A CIS layer (~2 µm thickness) is structured by standard direct laser ablation at higher energy densities and a process speed up to 200 mm/s. A 1.5 µm thick ZnO front electrode layer can be line separated with P3 speed up to several 1000 mm/s by indirect induced laser ablation. We demonstrate that direct induced (P1) and indirect induced (P3) picosecond laser ablation are not purely thermal processes working at energy densities far below the evaporation enthalpy. To increase the scribing speed elliptical and rectangular beam profiles were investigated. Validation of the processes for functionality within a CIS solar cell will be presented.
“…3 mm thick float glass substrates with a size of 100 mm by 100 mm from different stages of the R&D pilot line process of AVANCIS [18] were used (see Figure 1). The P1 front side and back side structuring experiments to achieve a galvanic separation of the p-contact were performed on Mo-films.…”
Section: Samples and Process Requirementsmentioning
We report on the selective structuring of CIS (Cu(In,Ga)(S,Se) 2 ) thin film solar cells applying picosecond lasers at 1064 nm. For a monolithic serial interconnection the thin layers are selectively separated by so called laser patterns 1, 2 and 3 (P1, P2 and P3). We demonstrate that the half micron thick molybdenum back electrode can be structured with a P1 process speed of more than 4 m/s without detectable residues and damages by direct induced laser ablation from the back side. A CIS layer (~2 µm thickness) is structured by standard direct laser ablation at higher energy densities and a process speed up to 200 mm/s. A 1.5 µm thick ZnO front electrode layer can be line separated with P3 speed up to several 1000 mm/s by indirect induced laser ablation. We demonstrate that direct induced (P1) and indirect induced (P3) picosecond laser ablation are not purely thermal processes working at energy densities far below the evaporation enthalpy. To increase the scribing speed elliptical and rectangular beam profiles were investigated. Validation of the processes for functionality within a CIS solar cell will be presented.
“…These compounds are readily obtained with the p-type conductivity and, in combination with the n-type CdS, can form the p-n heterojunction necessary for the separation of photo-generated carriers. A remarkable property of chalcopyrites is their ability to form solid solutions, CuInS x Se 2−x [4,5], CuIn x Ga 1−x Se 2 [1,2,6], CuIn x Ga 1−x S y Se 2−y [1,7,8], etc., which not only allow tuning the semiconductor band gap to achieve the maximum photoconversion efficiency but also ensure the observed high tolerance to compositional variations. In this respect, the investigation of phase relations between ternary chalcopyrites together with other II-VI compounds is important to assess possible element interdiffusion at the p-n heterojunction and to extend the knowledge about solid solutions and possible intermediate phases.…”
“…To increase efficiency of solar cell and to reduce their costs, both improvements in the production technology of classical silicon solar cells as well as the search for alternative materials are pursued. Promising candidates for thin film solar cells are ternary compounds CuInSe 2 CuInS 2 , CuGaSe 2 and their solid solutions CuInS x Se 2−x , CuIn x Ga 1−x Se 2 , CuIn x Ga 1−x S y Se 2−y [1][2][3][4][5][6][7][8]. These materials are intrinsic p-type semiconductors and form p-n junction with n-type CdS buffer layer.…”
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