New Approach for Frequency Matching of Tuning Fork Gyroscopes by Using a Nonlinear Driving Concept

Schwarzelbach, O.; Fakas, Georgios; Nienkirchen, W.

doi:10.1007/978-3-642-59497-7_110

Cited by 5 publications

(1 citation statement)

References 2 publications

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“…In case that the amplitude exceeds its upper bound value, the induced nonlinearity of the suspended beam thus causes unexpected instability. Although Schwarzelbach has made use of nonlinear property to improve sensitivity (Schwarzelbach et al 2001), the amplitude for the purpose of this work is made to satisfy the inequality below…”

Section: Interface Circuitsmentioning

confidence: 99%

Application of an optimization methodology for multidisciplinary system design of microgyroscopes

Yuan

Chang

et al. 2005

Microsyst Technol

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Microgyroscopes integrated with micro-transducers, readout and control circuits in a common board normally form complex microsystems. Optimization of the design of such systems requires thorough understanding of the coupling effects of their working environments, their physical structural parameters, their construction of electronics, and their fabrication processes, etc. prior to any design verification by costly and time-consuming prototyping. A tuning fork gyroscope was taken as an example to demonstrate the principle for optimizing the necessary multidisciplinary design procedures in designing MEMS, typically including: the environmental quality factors, structural properties, readout circuits, and fabrication factors. It then used genetic algorithm (GA) to optimize the global sensitivity by a specifically designed searching methodology. The so obtained optimal results were further verified by a FEM modal analysis and by an experiment with an acceptable resolution.

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Section: Interface Circuitsmentioning

confidence: 99%

Application of an optimization methodology for multidisciplinary system design of microgyroscopes

Yuan

Chang

et al. 2005

Microsyst Technol

View full text Add to dashboard Cite

show abstract

Multidisciplinary design and optimization of integrated microsystems

Chang¹,

Li²,

Yuan³

et al. 2004

2004 International Conference on Intelligent Mechatronics and Automation, 2004. Proceedings.

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Application of nonlinear driving in frequency matching of tunneling gyroscope

Wang

et al. 2012

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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The nonlinear vibration behavior of drivin g mode of a tunnelin g g yroscope is measured and simulated. Based upon these testin g results, a new method for frequency matchin g is presented. Compared to traditional harmonic vibration, lar g e amplitude and wide shift resonance frequency could be obtained in stable re g ion of nonlinearity by usin g this approach, especially, in this re g ion g yroscope could spontaneously vibrate at a certain driven frequency without needin g sweep-up frequency excitation.In our tunnelin g g yroscope, the vibration amplitude changes from l�m to 5�m at jumpin g -up point J I with the amplitude of the excitation electrostatic force increasin g . At the same time, the resonant frequency of drivin g mode can be shifted from nature frequency 1.81 kHz to 2.2 kHz, which is much closed to the resonant frequency of sensin g mode (2.23 kHz). This effect can be used as an alternative approach to trim the frequency and eliminate the frequency mismatchin g for the post-fabrication tunnelin g g yroscope, eventually, hi g her sensitivity could be g otten than usin g linear drivin g mode.

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New Approach for Frequency Matching of Tuning Fork Gyroscopes by Using a Nonlinear Driving Concept

Cited by 5 publications

References 2 publications

Application of an optimization methodology for multidisciplinary system design of microgyroscopes

Application of an optimization methodology for multidisciplinary system design of microgyroscopes

Multidisciplinary design and optimization of integrated microsystems

Application of nonlinear driving in frequency matching of tunneling gyroscope

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