Polyethylenterephtalate foils (10 μm thick with the density of ρ = 1.3 g cm−3) were irradiated with 150 keV Ar+ ions to fluences from 5×1011 to 1×1015 cm−2 and one year after the irradiation they were exposed to a 5 M water solution of LiCl at the boiling point for times ranging from 15 s up to 8 h. The depth profiles of incorporated Li atoms as a function of the ion fluence and the doping time were determined using the neutron depth profiling technique based on the 6Li(nth, α)3H nuclear reaction. The Li content in the 600 nm thick surface layer achieves saturation very rapidly, already after 15 s doping time, and it exhibits a local, pronounced maximum at 2 or 4 h doping times for the specimens irradiated to fluences below and above 5×1014 cm−2, respectively. The concentration depth profiles of incorporated Li atoms consist of a pronounced surface component, obviously connected with radiation damages created by the ion irradiation and a long inward tail which is due to regular diffusion in pristine polymer. As a function of ion fluence, the Li content increases up to the fluence of 5×1013 cm−2 and then declines in most cases. The surface component of the Li depth profiles changes dramatically with increasing ion fluence from bell‐shaped ones for fluences below 5×1014 cm×2 to those characterized by a depleted surface layer and a rather sharp concentration maximum at depths significantly exceeding the calculated ion projected range.