2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference 2011
DOI: 10.1109/asmc.2011.5898198
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Neural network modeling of fabrication yield using manufacturing data

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Cited by 4 publications
(2 citation statements)
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“…Some researches focus on how to establish an exact prediction model for KPI. Mevawalla et al used three neural networks to forecast yield [1] , it could get better forecasting accuracy compared with the traditional statistical methods. But the sequential neural network model, which was constituted by two neural networks, was too complex.…”
Section: Introductionmentioning
confidence: 99%
“…Some researches focus on how to establish an exact prediction model for KPI. Mevawalla et al used three neural networks to forecast yield [1] , it could get better forecasting accuracy compared with the traditional statistical methods. But the sequential neural network model, which was constituted by two neural networks, was too complex.…”
Section: Introductionmentioning
confidence: 99%
“…ANNs have been used to solve numerous problems associated with manufacturing operations. Application of ANN in manufacturing system design [2]- [6], manufacturing process control [7], robot scheduling [8], industrial pattern recognition [9], and manufacturing operational decision [10] is reported.…”
Section: Introductionmentioning
confidence: 99%