Abstract:We report on determining the
optical constants of Ta in the sub-extreme ultraviolet (EUV) spectral
range 5.0–24.0 nm from the angle-dependent reflectance (ADR)
measured using monochromatized synchrotron radiation. Two sputtered
samples with differing thicknesses were investigated. Complementarily
x-ray reflectance was measured at shorter wavelengths and evaluated by
Fourier transform to facilitate an unambiguous selection of a model
for the data evaluation based on an inverse… Show more
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