Abstract:The authors report their initial studies of the negative resist behavior of neutral sodium atoms deposited on alkanethiol molecules during neutral atom lithographic processing. Their results show that neutral sodium atoms incident upon octadecanethiol, the longest molecule of the various alkanethiols among alkanethiol self-assembled monolayers ͑SAMs͒, formed the most robust negative resist during the patterning process and made high quality patterning profile. In order to interpret the nature of the surface in… Show more
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