“…InN, as one of the members in the III-nitrides group, has attracted intensive interest ever since being discovered with a narrow band gap (e.g., ~0.7 eV) by Davydov et al [1] and is predicted to have the highest electron mobility among the III-nitrides group (~4400 cm 2 /V•s). These characteristics mentioned above make InN a potential material in high-speed electronic device (HEMT), photodetectors, solar cells and light-emitting devices [2][3][4][5]. However, practical application is still limited by the large number of defects, which is caused from dislocations, native and extrinsic defects such as threading dislocations, V N , Si, O and H [6,7].…”