Near-Net Ceramic Micro-Tubes Fabricated by Electrophoretic Deposition Process

Yoo, Ju Hyun; Gao, Wei

doi:10.1142/s021797920301865x

Cited by 10 publications

(5 citation statements)

References 5 publications

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“…Various thicknesses from several to a hundred micrometers, that are not practically obtained with other techniques, can be easily achieved by EPD 10,11 . EPD has been reported in the fabrication of electroceramics and MEMS over the last few years 12–15 . In EPD, colloidal, charged particles deposit from a stable suspension onto an oppositely charged electrode upon the application of a dc electric field.…”

Section: Introductionmentioning

confidence: 99%

Electrophoretic Deposition of Lead Zirconate Titanate Films on Metal Foils for Embedded Components

Vilarinho

Kingon

2005

Journal of the American Ceramic Society

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Lead zirconate titanate (PZT) thick films in the thickness range of 5-200 lm on 20 lm copper and 25 lm platinum foils were prepared by electrophoretic deposition (EPD) for application as embedded passive components. The EPD process was conducted in glacial acetic acid medium, and the effects of deposition parameters, such as dc voltage values, processing times, and suspension aging on the film thickness and composition stoichiometry were evaluated. The dependence of the film thickness on the current and aging of the suspension was established and correlated to the chemical modifications occurring in the suspension. Films sintered at 11501C for 30 min exhibited uniform and dense microstructures with an average grain size of 1.5 lm. A dielectric permittivity of around B1330 and loss tangent of 0.05 were measured for films with 8 lm of thickness. The films showed remanent polarization and a maximum polarization value of 24 and 38 lC/cm 2 , respectively. These properties, comparable with those of bulk PZT ceramics, suggested potential applications of the EPD process for the deposition of ferroelectric thick films on metal foils for embedded component applications.

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Section: Introductionmentioning

confidence: 99%

Electrophoretic Deposition of Lead Zirconate Titanate Films on Metal Foils for Embedded Components

Vilarinho

Kingon

2005

Journal of the American Ceramic Society

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“…19. In EPD, colloidal particles such as polymers, ceramics, and metals carry a surface charge and thus can be attracted to the opposite change electrode [129][130][131][132][133]. Green parts can be demoulded and sintered once the particles fill the mould cavity.…”

Section: Electro-phoretic Depositionmentioning

confidence: 99%

Micro-fabrication of ceramics: Additive manufacturing and conventional technologies

et al. 2021

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Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such as high-temperature resistance, high wear resistance, low density, and favourable mechanical and chemical properties at elevated temperature. However, with the emerging of additive manufacturing, the use of ceramics for functional and structural MEMS raises new opportunities and challenges. This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS, including additive and conventional manufacturing technologies. The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles, main features, and processed materials. Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers, post-processing at the micro-level, resolution, and quality control. The paper also sheds light on the new possibilities of ceramic additive micro-fabrication and their potential applications, which indicates a promising future.

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“…Suspended particles such as ceramics, metals, or polymers can be dispersed in the electrolyte suspension to improve the performance or the properties of the fabricated microparts. [ 28–32 ] LIGA is one of the most popular microfabrication technologies. It refers to a German acronym that stands for “lithographie, galvanoformung, abformung,” which means “lithography, electroplating, and molding.” The UV‐ray LIGA and X‐ray LIGA are two common LIGA manufacturing processes.…”

Section: Conventional Microfabrication Processesmentioning

confidence: 99%

Microadditive Manufacturing Technologies of 3D Microelectromechanical Systems

2021

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Conventional microfabrication processes have been well established, but their capabilities are generally limited simple and 2D extruded geometries. Additive manufacturing allows the ability to manufacture true 3D complex geometries, rapid design for manufacturing, mass customization, materials savings, and high precision, which have triggered the increased interest in manufacturing microelectromechanical systems (MEMS). Herein, MEMS manufacturing's recent advancements, including both conventional and additive manufacturing technologies, their working principles, and practical capabilities are consolidated. The use of additive manufacturing in several MEMS areas such as in microelectronics, circuitry, microfluidics, lab on a chip, packaging, and structural MEMS is also discussed in detail. Furthermore, the potentials and limitations of additive manufacturing are investigated with regard to the MEMS requirements. Finally, the technology outlook and improvements are discussed. This study shows that additive manufacturing offers a promising future for the fabrication of MEMS, especially using high‐resolution techniques such as microstereolithography, materials jetting, and materials extrusion. In contrast, current challenges such as materials requirements, equipment innovation, fabricating of in vivo devices for biomedical applications, inherited defects and poor surface finish, adhesion to substrates, and productivity are areas that require further study to increase the uptake by the MEMS community.

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Near-Net Ceramic Micro-Tubes Fabricated by Electrophoretic Deposition Process

Cited by 10 publications

References 5 publications

Electrophoretic Deposition of Lead Zirconate Titanate Films on Metal Foils for Embedded Components

Electrophoretic Deposition of Lead Zirconate Titanate Films on Metal Foils for Embedded Components

Micro-fabrication of ceramics: Additive manufacturing and conventional technologies

Microadditive Manufacturing Technologies of 3D Microelectromechanical Systems

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