“…For comparison, the XRD pattern of the NC-FeSi 2 film deposited on a Si(1 1 1) substrate by facing targets direct-current sputtering (FTDCS) was measured in the same manner shown in figure 2. The XRD pattern of the NC-FeSi 2 film deposited by PLD shows a broad peak in the 2θ range between 40 and 50° [14,17], which is similar to that of NC-FeSi 2 film deposited by FTDCS [15]. In this range, orthorhombic β-FeSi 2 has several crystalline planes for diffraction, such as 331, 313, 040, 004, 041, 114, 511, 422, and 133.…”