Near-field scanning millimeter-wave microscope combined with a scanning electron microscope

Haddadi, Kamel; Haenssler, Olaf C.; Boyaval, Christophe; Théron, Didier; Dambrine, Gilles

doi:10.1109/mwsym.2017.8058957

Cited by 4 publications

(5 citation statements)

References 13 publications

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“…The instrumentation developed incorporates 3 imaging modes (topography, radiofrequency and electronic) that can be run individually or simultaneously. Preliminary developments have been presented in [34][35][36][37][38]. Consequently, this section provides an overview of the modes of implementation to help the reader.…”

Section: Description Of the Scanning Microwave Microscope Built Inside A Scanning Electron Microscopementioning

confidence: 99%

“…There is an urgent need to develop SMM traceability to yield quantitative and calibrated data. In this effort, we developed a SMM operating inside a scanning electron microscope (SEM) using a microstrip probe structure operating up to 67 GHz [34][35][36][37][38]. Our previous works were completed by first presenting quantitative data performed at 30 GHz on microsized metal oxide semiconductor (MOS) capacitors.…”

Section: Introductionmentioning

confidence: 99%

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Near-Field Scanning Millimeter-Wave Microscope Operating Inside a Scanning Electron Microscope: Towards Quantitative Electrical Nanocharacterization

et al. 2021

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The main objectives of this work are the development of fundamental extensions to existing scanning microwave microscopy (SMM) technology to achieve quantitative complex impedance measurements at the nanoscale. We developed a SMM operating up to 67 GHz inside a scanning electron microscope, providing unique advantages to tackle issues commonly found in open-air SMMs. Operating in the millimeter-wave frequency range induces high collimation of the evanescent electrical fields in the vicinity of the probe apex, resulting in high spatial resolution and enhanced sensitivity. Operating in a vacuum allows for eliminating the water meniscus on the tip apex, which remains a critical issue to address modeling and quantitative analysis at the nanoscale. In addition, a microstrip probing structure was developed to ensure a transverse electromagnetic mode as close as possible to the tip apex, drastically reducing radiation effects and parasitic apex-to-ground capacitances with available SMM probes. As a demonstration, we describe a standard operating procedure for instrumentation configuration, measurements and data analysis. Measurement performance is exemplarily shown on a staircase microcapacitor sample at 30 GHz.

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Section: Description Of the Scanning Microwave Microscope Built Inside A Scanning Electron Microscopementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Near-Field Scanning Millimeter-Wave Microscope Operating Inside a Scanning Electron Microscope: Towards Quantitative Electrical Nanocharacterization

et al. 2021

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“…In this context, the usage of broadband microwave testing in Ku (12–18 GHz) and K (18–26.5 GHz) bands is considered a promising way to bypass several other methods limitations [ 10 ]. Electromagnetic waves are susceptible to changes associated with boundary interfaces.…”

Section: Introductionmentioning

confidence: 99%

“…Microwaves, due to having indisputably low invasiveness, are significant interests for the purposes of composite inspection for the whole lifetime cycle [ 5 , 11 , 12 ]. It has also been suggested [ 5 , 10 , 13 , 14 ] to merge different NDT methods if it is only possible to conduct them simultaneously.…”

Section: Introductionmentioning

confidence: 99%

Microwave Non-Destructive Testing for Delamination Detection in Layered Composite Pipelines

Sobkiewicz

Bieńkowski

Błażejewski

2021

Sensors

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Microwave imaging and defectoscopy are promising techniques for dielectric composite evaluation. Their most significant advantage is their relatively high penetration depth. Another feature worth noting is that traditional methods could not acquire an internal content with such a low impact on both the sample and surrounding environment, including the test operator, compared to other techniques. This paper presents microwave non-destructive and noninvasive methods for quality evaluation of layered composite materials using an open-ended waveguide probe. Pure |S11| parameters only exceptionally give a clear answer about the location of material cracks. Therefore, this makes it necessary to analyze these parameters simultaneously along with several other factors, such as stand-off distance, probe type or wave polarization. The purpose of the work was to find the dependency between the physical state of a layered composite powerplant pipeline and the S-matrix parameters response (reflection and transmission parameters) in a Ku frequency band that has not yet been extensively researched. Lower-frequency measurements broaden the application possibility for thicker composites, mainly because of a higher penetration depth and measurement setup availability. Different methods have been shown, including reflection and transmission/reflection methods, both in close proximity and in stand-off distance. The measurements are based on a low-complexity experimental setup.

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“…Indeed, water meniscus in the vicinity of the probe tip and material surface alter the measurement quality and remains difficult to be modelled accurately [11]. In this effort, a novel instrumentation has been thought and built from scratch [12]- [13]. The instrumentation has been designed to operate inside a scanning electron microscope (SEM) for environment control and water meniscus elimination [14]- [15].…”

Section: Introductionmentioning

confidence: 99%

Operation of Near-Field Scanning Millimeter-wave Microscopy up to 67 GHz under Scanning Electron Microscopy Vision

Polovodov

Théron

Eliet

et al. 2020

2020 IEEE/MTT-S International Microwave Symposium (IMS)

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A near-field scanning millimeter-wave microscope is developed with broadband capabilities up to 67 GHz. The instrumentation has been designed to operate inside a scanning electron microscope for environment control and water meniscus elimination. Scanning electron microscopy imaging of the tip / sample interaction gives the unique possibility to limit the scan area and preserve the integrity of the probe tip. In addition, hybrid imaging considering simultaneously atomic, microwave and electron microscopy tools is beneficial for further modeling to address the quantitative characterization of nanomaterials. Experimental data are exemplary shown to demonstrate the viability of the solution proposed.

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Near-field scanning millimeter-wave microscope combined with a scanning electron microscope

Cited by 4 publications

References 13 publications

Near-Field Scanning Millimeter-Wave Microscope Operating Inside a Scanning Electron Microscope: Towards Quantitative Electrical Nanocharacterization

Near-Field Scanning Millimeter-Wave Microscope Operating Inside a Scanning Electron Microscope: Towards Quantitative Electrical Nanocharacterization

Microwave Non-Destructive Testing for Delamination Detection in Layered Composite Pipelines

Operation of Near-Field Scanning Millimeter-wave Microscopy up to 67 GHz under Scanning Electron Microscopy Vision

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