Near Field Optics and Nanoscopy

Fillard, J.P.

doi:10.1142/2833

Cited by 92 publications

(51 citation statements)

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“…It follows that the source of contrast must be related to the actual geometrical shape of the beam, collimated in the near field and divergent in the far field. 16 The fact that the beam is collimated at the exit of the tip for distances comparable to the aperture diameter, while it has a divergence of ϳ80°in the far field, indicates that some of the light rays are totally reflected by the sapphire substrate at the air interface, Fig. 6.…”

Section: Fig 4 Ir Transmission ͑Left͒mentioning

confidence: 99%

“…Therefore, in the IR one expects transmittances of only 10 Ϫ9 -10 Ϫ12 . Third, while a typical visible NSOM uses photomultipliers or avalanche photodiodes for detection with detectivities of ϳ10 16 Hz 1/2 cm W Ϫ1 , liquid-nitrogen-cooled photoconductive detectors used around 3 m do not achieve better than a few a 10 11 Hz 1/2 cm W Ϫ1 . Finally, cross sections associated with vibrational bands are generally smaller than those associated with electronic transitions and one expects accordingly less contrast from a ''vibrational'' band-specific image.…”

Section: Introductionmentioning

confidence: 99%

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Transmission near-field scanning microscope for infrared chemical imaging

Dragnea

Preusser

Schade

et al. 1999

Journal of Applied Physics

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We report transmission infrared near-field scanning microscopy ͑IR-NSOM͒ imaging of chemically amplified photoresist polymers patterned by ultraviolet exposure. Chemical specificity was attained using infrared wavelengths tuned to the 3 m OH stretch absorption band of the polymer, a band sensitive to the chemical changes characteristic of the lithographic photochemical process of this material. Contrast mechanisms are discussed together with the IR-NSOM specifics, such as the fabrication of an infrared near-field probe with high throughput, which lead to an attainable resolution of /10 and a transmission sensitivity of 1%.

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Section: Fig 4 Ir Transmission ͑Left͒mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Transmission near-field scanning microscope for infrared chemical imaging

Dragnea

Preusser

Schade

et al. 1999

Journal of Applied Physics

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“…This suggests that the errors with the Mirau objective are linked to aberrations in the optical system introduced by tilting the reference mirror. These could arise from the tilt of the transparent plate holding the reference mirror and the semi-transparent front window (see [5]). …”

Section: Objectivementioning

confidence: 99%

“…White light scanning interferometry (WLSI), or Coherence Probe Microscopy (CPM) is being used increasingly for carrying out metrology on such complex structures [1,2]. The use of far field imaging and a thin virtual scanning probe plane leads to submicron lateral resolution, nanometric axial resolution and the ability to analyze large areas at high speed non-destructively [3,4,5,6]. In previous work [7] a miniature FT spectrometer made with MOEMS technology [8] was investigated using WLSI to explore some of the challenges of carrying out fast, accurate 3D dimensional metrology on such devices.…”

Section: Introductionmentioning

confidence: 99%

Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy

Montgomery

Montaner²,

Manzardo³

et al. 2004

SPIE Proceedings

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ABSTRACT259 words White light scanning interference microscopy is being used increasingly in the rapid 3D characterization of MOEMS micro-systems because of its very high axial resolution over large depths. Although this technique can be used for submicron lateral resolution measurement of critical dimensions on micron high microelectronic structures, recent tests using a standard system have revealed large errors in the lateral measurement of very narrow, deep structures. The use of a Mirau interference objective with the aperture diaphragm of the illumination system fully open in white light has revealed errors in the position of square edges of up to 3 µm. Thus the 2 µm wide, 75 µm deep teeth of an electrostatic comb structure in a FT MOEMS spectrometer appeared to be nearly 7 µm wide. Tests using different types of objectives, with different magnifications, aperture diaphragm values and illumination wavelengths show that the error is greatest for the Mirau objective, with wide aperture diaphragms at longer wavelengths. In addition, the location of the centre of such structures can vary by up to 1 µm depending on the degree of reference mirror tilt. Investigations of the XZ images of square steps have revealed the presence of "ghost" fringes that can lead to errors in the edge position. Initial studies indicate that these errors are a consequence of a subtle interplay between diffraction effects and the conical illumination. The errors can be considerably reduced using a Linnik type objective with the aperture diaphragm closed down in the presence of shorter wavelength light and the reference mirror perpendicular to the optical axis.

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“…Over the past ten years, developments in near-field optics and near-field optical microscopy have been summarized in several review articles and books (Girard and Dereux, 1996;Paesler and Moyer, 1996;Fillard, 1996;Fischer, 1998;Dunn, 1999;Ohtsu and Hori, 1999;Courjon, 2003;Kawata, 2002;Richards and Zayats, 2004;Wiederrecht, 2004;Hong, 2004;Prasad, 2004;Keller, 2005;Novotny and Stranick, 2006;Novotny and Hecht, 2006;Bouhelier, 2006). As with all review articles and historical perspectives, it is not possible to account for all the individual contributions in the field.…”

Section: Introductionmentioning

confidence: 99%

History of Near-field Optics

Courjon¹

2003

Near-Field Microscopy and Near-Field Optics

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This article provides a review of early work and developments in the field of near-field optics. The roots trace back to the letters exchanged between Edward Hutchinson Synge and Albert Einstein in 1928 and, because of the analogy to antenna theory and lightning rods, the origins project back to the time of Benjamin Franklin who discovered the wonderful Effect of Points both in drawing off and throwing off the Electrical Fire. The modern interest was mainly inspired by the invention of scanning probe microscopy and by the first optical near-field measurements by Dieter W. Pohl and co-workers at the IBM Research Laboratory in Rüschlikon, Switzerland, and also by parallel developments of other groups. Near-field optics received inspiration from the fields of surface enhanced spectroscopy and from studies of energy transfer. While optical near-fields were extensively exploited for overcoming the diffraction limit in optical imaging the study of their physical aspects revealed unique properties which cannot be imitated by free propagating radiation.

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Near Field Optics and Nanoscopy

Cited by 92 publications

References 0 publications

Transmission near-field scanning microscope for infrared chemical imaging

Transmission near-field scanning microscope for infrared chemical imaging

Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy

History of Near-field Optics

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