2003
DOI: 10.1063/1.1539278
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Near-field optical lithography of a conjugated polymer

Abstract: We report the fabrication of poly(p-phenylene vinylene) nanostructures by direct scanning near-field lithography of its soluble precursor. The technique is based on the spatially selective inhibition of the precursor solubility by exposure to the ultraviolet optical field present at the apex of scanning near-field fiber probes with aperture diameters between 40 and 80 nm (±5 nm). After development in methanol and thermal conversion under vacuum we obtain features with a minimum dimension of 160 nm. We demonstr… Show more

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Cited by 113 publications
(79 citation statements)
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“…In some cases, for example for organic semiconductors (OS), it is also possible to write directly the final semiconductors nanostructures by exposure to optical evanescent ways without the use of a sacrificial resist [36].…”
Section: Photolithographymentioning
confidence: 99%
See 1 more Smart Citation
“…In some cases, for example for organic semiconductors (OS), it is also possible to write directly the final semiconductors nanostructures by exposure to optical evanescent ways without the use of a sacrificial resist [36].…”
Section: Photolithographymentioning
confidence: 99%
“…Although they are predicted to have extremely high transmission efficiency, apertureless optical fiber tips with high transmission efficiency have never been manufactured [32,33]. On the contrary, apertured tips have been widely used in light nano-focusing, albeit without the aid of the surface plasmons [26,[34][35][36]. In 2009, apertured tips exploiting the surface plasmons to confine light to sub-wavelength spot sizes (λ/3) in optical fibers and microfibers were realized [37,38]: the use of the SPs improved transmission efficiency by several orders of magnitude.…”
Section: Introductionmentioning
confidence: 99%
“…One-dimensional micro-and nano-fiber devices have been prepared using ES [211][212][213][214][215][216][217][218][219], hard and soft template-assisted methods [220][221][222], self-assembly [223][224][225], scanning probe lithography (direct writing) [226][227][228], direct drawing [229,230], nanoimprint lithography [131], nanofluidics [231], and physical vapor transport and deposition [232]. Review articles of these methods have been published by Kim et al [36] and Long et al [233].…”
Section: Fabrication Of Organic Micro-and Nanofiber Semiconductor Symentioning
confidence: 99%
“…Light was injected into the waveguide and propagated to the disk were light remains confined at the edges of the disk. The strong bend implies a large evanescent field in the surrounding medium, which can be exploited for evanescent coupling towards sub-micronic or micronic structures [26] or for species detection [16]. …”
Section: Optical Characterizations Of the Transportable Waveguiding Smentioning
confidence: 99%
“…Two approaches are mainly developed for their fabrication. The first one is based on lithographic processes, mainly e-beam lithography and scanning probe lithography, such as scanning electrochemical lithography [15], scanning near-field optical lithography [16], or nano-imprint strategies [17]. All these methods make it possible to elaborate nanowires directly onto the photonic chip.…”
Section: Introductionmentioning
confidence: 99%