Near-field imaging and nano-Fourier-transform infrared spectroscopy using broadband synchrotron radiation

Hermann, Péter; Hoehl, Arne; Patoka, Piotr; Huth, Florian; Rühl, E.; Ulm, G.

doi:10.1364/oe.21.002913

Cited by 95 publications

(73 citation statements)

References 19 publications

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“…Third, to effectively collect a broad spectrum, broadband infrared sources with Fourier transform–type detection are necessary ( 6 ). Although there are successful examples of using difference frequency generation from femtosecond lasers ( 7 ) or synchrotron infrared radiation ( 13 , 14 ), these light sources are expensive or only limited to certain geographic locations. Compact and less-expensive narrow-band infrared sources such as quantum cascade lasers (QCLs) are not effective for the collection of a broad infrared spectrum with s-SNOM.…”

Section: Introductionmentioning

confidence: 99%

Nanoscale simultaneous chemical and mechanical imaging via peak force infrared microscopy

et al. 2017

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Section: Introductionmentioning

confidence: 99%

Nanoscale simultaneous chemical and mechanical imaging via peak force infrared microscopy

et al. 2017

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“…This includes tunable gas lasers with a rather limited accessible spectral range, thermal sources [37,38], quantum cascade lasers [39], and synchrotron radiation [40,41]. Successful nano-FTIR measurements using synchrotron radiation were recently demonstrated on partially Au-coated SiC samples [42]. Yet, for a better evaluation of the capability of this approach additional experiments are required involving more challenging samples are required, which is subject of the present study.…”

Section: Introductionmentioning

confidence: 99%

Characterization of semiconductor materials using synchrotron radiation-based near-field infrared microscopy and nano-FTIR spectroscopy

Hermann¹,

Hoehl²,

Ulrich³

et al. 2014

Opt. Express

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Abstract:We describe the application of scattering-type near-field optical microscopy to characterize various semiconducting materials using the electron storage ring Metrology Light Source (MLS) as a broadband synchrotron radiation source. For verifying high-resolution imaging and nano-FTIR spectroscopy we performed scans across nanoscale Si-based surface structures. The obtained results demonstrate that a spatial resolution below 40 nm can be achieved, despite the use of a radiation source with an extremely broad emission spectrum. This approach allows not only for the collection of optical information but also enables the acquisition of nearfield spectral data in the mid-infrared range. The high sensitivity for spectroscopic material discrimination using synchrotron radiation is presented by recording near-field spectra from thin films composed of different materials used in semiconductor technology, such as SiO 2 , SiC, Si x N y , and TiO 2 . ©2014 Optical Society of AmericaOCIS codes: (120.0120) Instrumentation, measurement, and metrology; (180.4243) Near-field microscopy; (240.0240) Optics at surfaces; (300.0300) Spectroscopy; (310.6860) Thin films, optical properties. 1248-1262 (2014). 5. S. Kawata and Y. Inouye, "Scanning probe optical microscopy using a metallic probe tip," Ultramicroscopy 57(2-3), 313-317 (1995). 6. F. Zenhausern, Y. Martin, and H. K. Wickramasinghe, "Scanning interferometric apertureless microscopy: References and linksOptical imaging at 10 angstrom resolution," Science 269(5227), 1083-1085 (1995). 7. R. Bachelot, P. Gleyzes, and A. C. Boccara, "Near-field optical microscope based on local perturbation of a diffraction spot," Opt. Lett. 20(18), 1924-1926 (1995). 8. B. Knoll and F. Keilmann, "Near-field probing of vibrational absorption for chemical microscopy," Nature 399(6732), 134-137 (1999 Helm, "Anisotropy contrast in phonon-enhanced apertureless near-field microscopy using a free-electron laser," Phys. Rev. Lett.

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“…1A) (23). The suitability of synchrotron IR radiation for near-field spectroscopy and imaging has been recognized previously (24)(25)(26), but the bandwidth and spatial coherence of the source have not been fully used. The spatial coherence and high spectral irradiance enable diffractionlimited focusing, resulting in improved coupling of the incident light to the AFM tip.…”

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confidence: 99%

Ultrabroadband infrared nanospectroscopic imaging

Bechtel

Muller

Olmon

et al. 2014

Proc. Natl. Acad. Sci. U.S.A.

274

282

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Characterizing and ultimately controlling the heterogeneity underlying biomolecular functions, quantum behavior of complex matter, photonic materials, or catalysis requires large-scale spectroscopic imaging with simultaneous specificity to structure, phase, and chemical composition at nanometer spatial resolution. However, as with any ultrahigh spatial resolution microscopy technique, the associated demand for an increase in both spatial and spectral bandwidth often leads to a decrease in desired sensitivity. We overcome this limitation in infrared vibrational scattering-scanning probe near-field optical microscopy using synchrotron midinfrared radiation. Tip-enhanced localized light-matter interaction is induced by low-noise, broadband, and spatially coherent synchrotron light of high spectral irradiance, and the near-field signal is sensitively detected using heterodyne interferometric amplification. We achieve sub-40-nm spatially resolved, molecular, and phonon vibrational spectroscopic imaging, with rapid spectral acquisition, spanning the full midinfrared (700-5,000 cm) with few cm −1 spectral resolution. We demonstrate the performance of synchrotron infrared nanospectroscopy on semiconductor, biomineral, and protein nanostructures, providing vibrational chemical imaging with subzeptomole sensitivity.any properties and functions of natural or synthetic materials are defined by chemically or structurally distinct phases, domains, or interfaces on length scales of a few nanometers to micrometers. Characterizing these heterogeneities has long driven the development of advanced microscopy techniques, with notable advances in electron (1), photoemission (2), X-ray (3), and superresolution (4) microscopies. Although extremely effective, these techniques have strict sample requirements: either they operate in vacuum, are limited by electron or X-ray beam damage, or rely on labeling with exogenous fluorophores.In contrast, infrared (IR) vibrational spectroscopic imaging is minimally invasive, requires little sample preparation, is applicable in situ and under ambient conditions, and provides intrinsic chemical contrast and spectroscopic identification for a wide range of materials (5), including living cells (6) and tissues (7,8). The spatial resolution, however, is diffraction-limited to 2-10 μm, depending on wavelength. Moreover, high signal-to-noise spectra even at this low resolution are only possible with a source of high spectral irradiance (9). Subwavelength imaging has been achieved to some extent through point-spread function deconvolution (10, 11) and attenuated total reflection techniques (12). However, the micrometer-size wavelength of IR radiation, in general, has fundamentally limited its application for the characterization of essentially any mesoscopic, heterogeneous material where chemical information at the nanoscale is desired.Infrared scattering-scanning near-field microscopy (IR s-SNOM) overcomes the diffraction limit by scattering incident light with the typically metallic tip of an atomic for...

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Near-field imaging and nano-Fourier-transform infrared spectroscopy using broadband synchrotron radiation

Cited by 95 publications

References 19 publications

Nanoscale simultaneous chemical and mechanical imaging via peak force infrared microscopy

Nanoscale simultaneous chemical and mechanical imaging via peak force infrared microscopy

Characterization of semiconductor materials using synchrotron radiation-based near-field infrared microscopy and nano-FTIR spectroscopy

Ultrabroadband infrared nanospectroscopic imaging

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