2017
DOI: 10.1088/1361-6528/aa8479
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NbN superconducting nanonetwork fabricated using porous silicon templates and high-resolution electron beam lithography

Abstract: Superconducting NbN nanonetworks with a very small number of interconnected nanowires, with diameter of the order of 4 nm, are fabricated combining a bottom-up (use of porous silicon nanotemplates) with a top-down technique (high-resolution electron beam lithography). The method is easy to control and allows to fabricate, on a robust support, devices with electrical properties close to a one-dimensional superconductor that can be fruitfully used for novel applications.

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Cited by 8 publications
(6 citation statements)
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References 46 publications
(71 reference statements)
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“…These ideas comprise DNA sections as templates [ 117 ], molecular templates [ 118 ], and biomimetic templates from chitosan [ 119 ]. Other proposals made include self-assembled Si templates [ 120 ], combinations of porous Si with high-resolution electron beam lithography [ 121 ], block copolymer double gyroid-derived ceramic templates [ 122 ], and zeolite [ 123 ]. Using these new approaches, new superconducting materials were also obtained in nanowire form, including MgB and 3-MoN [ 124 ].…”
Section: Discussionmentioning
confidence: 99%
“…These ideas comprise DNA sections as templates [ 117 ], molecular templates [ 118 ], and biomimetic templates from chitosan [ 119 ]. Other proposals made include self-assembled Si templates [ 120 ], combinations of porous Si with high-resolution electron beam lithography [ 121 ], block copolymer double gyroid-derived ceramic templates [ 122 ], and zeolite [ 123 ]. Using these new approaches, new superconducting materials were also obtained in nanowire form, including MgB and 3-MoN [ 124 ].…”
Section: Discussionmentioning
confidence: 99%
“…It is because of this that such a formulation of the problem has become relevant, after semiconductors, and for superconductors. Indeed, advances in the technology of nanoscale structures fabrication with sizes down to 10 nm using various original methods have made it possible to make breakthroughs in the fundamental question of the dependence of the properties of nanoscale superconductors on size and shape [31,[334][335][336][337][338][339][340][341]. Because in nanoscale specimens it is impossible to neglect the discretization of the electronic spectrum due to confinement [342,343], which, along with the modification of the phonon spectrum, lead to new mechanisms for the generation of a superconducting order parameter.…”
Section: Qse and Electron-phonon Couplingmentioning
confidence: 99%
“…45 With those abilities, this technique can produce a narrow dimension of NPLA with high density, high accuracy, high resolution, high reliability, and high flexibility. [46][47][48][49][50][51] Generally, pattern formation with this technique can be divided into two categories, direct writing, and projection printing, and the chosen resist will determine the quality of the array. 52 Furthermore, in nanofabrication, the EBL process is followed by lift-off or etching depend on the requirement.…”
Section: Fabrication Of Nanopillar Arrays (Npla)mentioning
confidence: 99%