Native Oxide Layer Role during Cryogenic‐Temperature Ion Implantations in Germanium
Daniel Caudevilla,
Francisco José Pérez‐Zenteno,
Sebastián Duarte‐Cano
et al.
Abstract:Herein, the structural properties and chemical composition of Ge samples implanted with tellurium at cryogenic temperatures are analyzed, focusing on the role of the native oxide. For germanium, cryogenic‐temperature implantation is a requirement to achieve hyperdoped impurity concentrations while simultaneously preventing surface porosity. In this work, the critical role of the thin native germanium oxide is demonstrated when performing ion implantations at temperatures close to the liquid nitrogen temperatur… Show more
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