Nanotribology and MEMS

Kim, Seong H.; Asay, David B.; Dugger, Michael Thomas

doi:10.1016/s1748-0132(07)70140-8

Cited by 342 publications

(214 citation statements)

References 87 publications

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“…For such application the use of liquid lubricant is not possible. Oxidized silicon surfaces have been known to have poor tribological properties [4]. The growth of thin metallic films onto silicon devices for operation in reciproc motion appears to be a feasible alternative.…”

Section: Introductionmentioning

confidence: 99%

Chemical effects on the sliding friction of Ag and Au(111)

Kwan

Park

et al. 2017

Friction

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Abstract:We have investigated the sliding friction behavior of metallic couples with different enthalpy of mixing or reaction by friction force microscopy. Comparing the friction behavior of miscible and immiscible couples we find that in the first case friction is governed by adhesion while the shear strength is low (τ = 3-6 MPa). In the latter case of immiscible couples, adhesion is found to be low and the shear strength is large (τ ≈ 70 MPa). Statistical analysis of atomic stick-slip images recorded on an Au(111) surface with tips of different affinities with gold allows for a deeper understanding of our results. The periodicity of atomic stick-slip images corresponds to the interatomic distance of gold for immiscible counter-bodies. In contrast, for a reactive couple the periodicity of atomic stick-slip significantly differs from the gold interatomic distance and may correspond to the structural length of an ordered intermediate phase at the tip-surface interface.

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Section: Introductionmentioning

confidence: 99%

Chemical effects on the sliding friction of Ag and Au(111)

Kwan

Park

et al. 2017

Friction

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“…When the dimensions shrink to nanoscale, the ratio of surface area to volume greatly increases so that the interfacial forces become dominant [3]. As a result, the nanotribological problems involving friction, adhesion, and wear, have become an important concern in Si-MEMS [2][3][4].…”

Section: Introductionmentioning

confidence: 99%

Running-in process of Si-SiO x /SiO2 pair at nanoscale—Sharp drops in friction and wear rate during initial cycles

et al. 2013

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Abstract:Using an atomic force microscope, the running-in process of a single crystalline silicon wafer coated with native oxide layer (Si-SiO x ) against a SiO 2 microsphere was investigated under various normal loads and displacement amplitudes in ambient air. As the number of sliding cycles increased, both the friction force F t of the Si-SiO x /SiO 2 pair and the wear rate of the silicon surface showed sharp drops during the initial 50 cycles and then leveled off in the remaining cycles. The sharp drop in F t appeared to be induced mainly by the reduction of adhesion-related interfacial force between the Si-SiO x /SiO 2 pair. During the running-in process, the contact area of the Si-SiO x /SiO 2 pair might become hydrophobic due to removal of the hydrophilic oxide layer on the silicon surface and the surface change of the SiO 2 tip, which caused the reduction of friction force and the wear rate of the Si-SiO x /SiO 2 pair. A phenomenological model is proposed to explain the running-in process of the Si-SiO x /SiO 2 pair in ambient air. The results may help us understand the mechanism of the running-in process of the Si-SiO x /SiO 2 pair at nanoscale and reduce wear failure in dynamic microelectromechanical systems (MEMS).

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“…[16][17] Friction forces ranging from moderate to vanishingly small were obtained depending on the degree of commensurability between the lattices of the flake and the extended surface. The ability to achieve such a state of ultra-low friction, often termed a superlubric state, [18][19][20][21][22][23][24][25][26][27] is clearly of high interest both from the basic scientific perspective of nanotribology [28][29][30][31][32][33][34][35][36][37][38][39][40][41] and in light of the promising technological opportunities it carries.…”

mentioning

confidence: 99%

Interlayer commensurability and superlubricity in rigid layered materials

Hod

2012

Phys. Rev. B

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Superlubricity is a frictionless tribological state sometimes occurring in nanoscale material junctions. It is often associated with incommensurate surface lattice structures appearing at the interface. Here, by using the recently introduced registry index concept which quantifies the registry mismatch in layered materials, we prove the existence of a direct relation between interlayer commensurability and wearless friction in layered materials. We show that our simple and intuitive model is able to capture, down to fine details, the experimentally measured frictional behavior of a hexagonal graphene flake sliding on-top of the surface of graphite. We further predict that superlubricity is expected to occur in hexagonal boron nitride as well with tribological characteristics very similar to those observed for the graphitic system. The success of our method in predicting experimental results along with its exceptional computational efficiency opens the way for modeling large-scale material interfaces way beyond the reach of standard simulation techniques.

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Nanotribology and MEMS

Cited by 342 publications

References 87 publications

Chemical effects on the sliding friction of Ag and Au(111)

Chemical effects on the sliding friction of Ag and Au(111)

Running-in process of Si-SiO x /SiO2 pair at nanoscale—Sharp drops in friction and wear rate during initial cycles

Interlayer commensurability and superlubricity in rigid layered materials

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