2005
DOI: 10.1088/0957-4484/16/9/024
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Nanotribological characterization of self-assembled monolayers deposited on silicon and aluminium substrates

Abstract: Silicon and aluminium are the substrates of choice for various micro/nanoelectromechanical systems (MEMS/NEMS) including digital micromirror devices (DMD ® ). For efficient and failure-proof operation of these devices, ultrathin lubricant films of self-assembled monolayers (SAMs) are increasingly being employed. In this study, we investigate friction, adhesion and wear properties of various SAMs. Surface properties such as contact angle, adhesive force, friction force and coefficient of friction are compared f… Show more

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Cited by 95 publications
(66 citation statements)
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References 36 publications
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“…A 'continuous microscratch' technique developed for an AFM by Sundararajan & Bhushan (2001) gave a direct dependence of the scratch/wear depth on the applied normal load and has been used for understanding critical loads for 'visible' wear damage (Sundararajan & Bhushan 2001;Liu & Bhushan 2002;Tambe & Bhushan 2005g). Figure 1 shows a typical scanning electron microscopic image of such a wear mark and the associated wear particles.…”
Section: Measurement Techniquementioning
confidence: 99%
“…A 'continuous microscratch' technique developed for an AFM by Sundararajan & Bhushan (2001) gave a direct dependence of the scratch/wear depth on the applied normal load and has been used for understanding critical loads for 'visible' wear damage (Sundararajan & Bhushan 2001;Liu & Bhushan 2002;Tambe & Bhushan 2005g). Figure 1 shows a typical scanning electron microscopic image of such a wear mark and the associated wear particles.…”
Section: Measurement Techniquementioning
confidence: 99%
“…The current solutions to the tribological issues with MEMS are either to increase the surface 144 Nano Res (2009) 2: 143 150 Nano Research roughness through surface texturing or to improve the surface hydrophobicity through chemically modifying the silicon MEMS structure surfaces [7,8]. Chemically modifying a smooth silicon surface can only lead to a hydrophobic surface with WCA of up to 120° [9]. However, by combining surface chemical modifi cation and topography modifi cation, superhydrophobic surfaces with WCAs above 150° can be achieved [2,3], which enables further improvement of the tribological performance of MEMS devices.…”
Section: Introductionmentioning
confidence: 99%
“…For thin films/coatings, SAMs have low elastic modulus [33] and so the reduction in contact area is not significant. To reduce friction, a complex chemistry has to work such that the suitable selections of end groups, chain length and mixture of monolayers have to be taken into account [8]. Further, achieving uniform coating of SAMs on large surface areas without defects or polymerization poses a great challenge.…”
Section: Discussionmentioning
confidence: 99%
“…Examples include self-assembled monolayers (SAMs) [8], diamond-like carbon (DLC) coatings [9], and also vapor phase lubricants [4]. In order to overcome some of the limitations of chemical modifications, bio-inspired topographical modification of surfaces has recently emerged as an effective route to minimize friction at micro/nano-scale.…”
Section: Introductionmentioning
confidence: 99%