2000
DOI: 10.1016/s0007-8506(07)63454-4
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Nanotechnology: International Developments and Emerging Products

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Cited by 135 publications
(52 citation statements)
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“…Depending on the accuracy achieved, these applications are traditionally referred to as 'precision machining' or 'ultraprecision machining'. When the amount of material removed becomes increasingly small, the transition to nano-machining is made, which is an important branch of nanotechnology [3]. Electron beam lithography and X-ray lithography combined with chemical etching, electroplating and moulding (LIGA) are the enabling technologies for the fabrication of microelectronics and microsystems [4].…”
Section: Micro-machining Processesmentioning
confidence: 99%
See 1 more Smart Citation
“…Depending on the accuracy achieved, these applications are traditionally referred to as 'precision machining' or 'ultraprecision machining'. When the amount of material removed becomes increasingly small, the transition to nano-machining is made, which is an important branch of nanotechnology [3]. Electron beam lithography and X-ray lithography combined with chemical etching, electroplating and moulding (LIGA) are the enabling technologies for the fabrication of microelectronics and microsystems [4].…”
Section: Micro-machining Processesmentioning
confidence: 99%
“…The simulation revealed that during polishing an amorphous interface layer is formed ( figure 16). Because carbon atoms disrupted from the lattice undergo a transition from sp 3 to sp 2 or sp bond hybridization, they can form strong bonds with atoms sitting at the surface of the lattice, eventually pulling them into the growing amorphous layer. Thus, the surface activation by amorphous carbon atoms is the key for understanding the polishing process.…”
Section: Towards the Physics Of Micro-machiningmentioning
confidence: 99%
“…With technology everything was difficult in the past become easy now (Harris, 2004) .It is hard to confine technology in one side .Actually, it has many sections and types in every field (Mostafapour, Rezaei, & Ghabousi, 2012) .We know that nanotechnology is one of the important technologies in this world. It has many applications in many different fields such as energy, Nano devices, Nano fabrics, and Nano bio technology (Corbett, McKeown, Peggs, & Whatmore, 2000). In fact, Nano medicine is one of the important nanotechnology applications (Murday, Siegel, Stein, & Wright, 2009) and (M. Chen, Lin, & Cheng, 2013) .…”
Section: Introductionmentioning
confidence: 99%
“…The curves presented by [3] and updated recently by McKeown [4] in Figure 2 (in simplified form) trace the development in manufacturing capability in terms of achievable machining accuracy since the 1940's. Today, ultra-precision machine tools under computer control can position the tool relative to the workpiece to a resolution and positioning accuracy in the order of 1nm.…”
Section: Introductionmentioning
confidence: 99%