Nanostructuring at oblique incidence deposition of cobalt

Abstract

Nanocolumnar Co thin films growth by oblique angle deposition on Si substrate is experimentally studied. Formation of regular arrays of tilted Co nanocolumns has been observed at incidence angles more than 70°. It was found that the optimal conditions for nanostructuring are realized at the inclination angle 85°. As obtained films have magnetic anisotropy axis inclined to the substrate surface and oriented along nanocolumns. Such films might be perspective material for applications as a magnetic recording media for next generations of hard disks.