“…Her et al [6] incorporated silver oxide films into super resolution near field structures in optical memories. Thin films of silver oxide were deposited by several techniques such as thermal oxidation of silver films [7,8], thermal evaporation [9], pulsed laser deposition [10,11], sol-gel process [12], chemical vapour deposition [13], electro deposition [14], DC sputtering [15,16] and RF sputtering [17][18][19][20]. In the present work, RF magnetron deposition technique was employed for preparation of silver oxide films.…”