“…In the last years, thin films of shape memory alloys (SMA) have been recognized as promising and high performance materials in the field of microelectromechanical systems, sensors and actuators [1][2][3]. For this purpose, SMA thin films have been grown by different techniques like evaporation, sputtering, electrodeposition, etc [1][2][3][4][5]. One of the most important issues is the control of the chemical composition of the alloys, given that small changes in the composition generally induce great shifts in the martensitic transformation temperature (M s ).…”