Abstract:Thermal and fluid behavior are governing factors for the via processing of semiconducting substrates. In order to investigate the fundamentals, nanosecond (ns) time-resolved visualization of ns-pulse Nd:YAG laser ablation of SiC substrate has been performed for various conditions. Timeresolved visualizations have been conducted by using a ultra high speed camera with the frame rate of 200 million frames/second for the first time to reveal the ablation process in a single event with the temporal resolution of 5… Show more
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