“…Silica coating is widely used as an antireflective optical component in the high power laser systems owning to its high laser-induced damage threshold (LIDT) and excellent optical and thermomechanical properties [8][9][10].Various surface morphologies, such as periodic ripples, concentric rings [11,12], porous nanoparticles and microbumps [13], were found to be related with the different energy coupling mechanisms that dependent on the specific nature and structure of the material during the femtosecond or nanosecond laser ablation. Concentric rings of the porous silica coating induced by the nanosecond laser were observed in the previous publications [14,15], which were similar to those on the surface of the coatings deposited by the physical vapor deposition method [11,12,16]. Electron beam deposition and sol-gel are two general methods to prepare silica films [8].…”