2009
DOI: 10.1007/s11671-009-9426-3
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Nanoscale Visualization of Elastic Inhomogeneities at TiN Coatings Using Ultrasonic Force Microscopy

Abstract: Ultrasonic force microscopy has been applied to the characterization of titanium nitride coatings deposited by physical vapor deposition dc magnetron sputtering on stainless steel substrates. The titanium nitride layers exhibit a rich variety of elastic contrast in the ultrasonic force microscopy images. Nanoscale inhomogeneities in stiffness on the titanium nitride films have been attributed to softer substoichiometric titanium nitride species and/or trapped subsurface gas. The results show that increasing th… Show more

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Cited by 6 publications
(4 citation statements)
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“…The scope of the present work is limited to demonstrate the feasibility of the procedure, rather than to provide a detail understanding of the observed contrast. As it will be discussed elsewhere [20] TiN coatings may exhibit important differences in elastic contrast due to strain, structural defects, or coexistence of different phases. Contrast in IC-HFM images in Figure 3 may originate because of elasticity inhomogeneities.…”
Section: Resultsmentioning
confidence: 98%
“…The scope of the present work is limited to demonstrate the feasibility of the procedure, rather than to provide a detail understanding of the observed contrast. As it will be discussed elsewhere [20] TiN coatings may exhibit important differences in elastic contrast due to strain, structural defects, or coexistence of different phases. Contrast in IC-HFM images in Figure 3 may originate because of elasticity inhomogeneities.…”
Section: Resultsmentioning
confidence: 98%
“…To implement UFM, a standard commercial AFM (NANOTEC) was appropriately modified [2,4]. Data acquisition and analysis were carried out using the WSxM software [24].…”
Section: -Materials and Methodsmentioning
confidence: 99%
“…Ultrasonic Force Microscopy (UFM) is a powerful technique to investigate the elastic and adhesive response of materials on the nanoscale [1,2]. The procedure is capable to provide material contrast in both soft and hard samples, bringing additional advantages when compared with other Scanning Probe Microscopy (SPM) approaches [3][4][5][6]. Here, UFM is applied to the characterization of composite samples formed by SrTiO3 (STO) nanoparticles (NP) and poly(vinyl alcohol) (PVA).…”
Section: -Introductionmentioning
confidence: 99%
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