2008
DOI: 10.1063/1.2920776
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Nanoscale thickness double-gated field effect silicon sensors for sensitive pH detection in fluid

Abstract: In this work, we report on the optimization of a double-gate silicon-on-insulator field effect device operation to maximize pH sensitivity. The operating point can be fine tuned by independently biasing the fluid and the back gate of the device. Choosing the bias points such that device is nearly depleted results in an exponential current response—in our case, 0.70decade per unit change in pH. This value is comparable to results obtained with devices that have been further scaled in width, reported at the fore… Show more

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Cited by 26 publications
(27 citation statements)
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“…Here, we show that this device works like a double-gate organic thin-film transistor (DG OTFT), which is one of the classical transducer configurations for biosensing devices [20]. In a double-gate transistor, one of the two gates is the conventional bottom-gate and one is the additional top-gate.…”
mentioning
confidence: 99%
“…Here, we show that this device works like a double-gate organic thin-film transistor (DG OTFT), which is one of the classical transducer configurations for biosensing devices [20]. In a double-gate transistor, one of the two gates is the conventional bottom-gate and one is the additional top-gate.…”
mentioning
confidence: 99%
“…Silicon field-effect devices were fabricated in our lab using SOI wafers and a VLSI-compatible process [63,64]. Colloidal Au nanoparticles (Au-NPs) of 5-nm mean diameter were purchased from Sigma and used as received.…”
Section: Methodsmentioning
confidence: 99%
“…Here, we demonstrate the applicability and versatility of monoalkoxysilylation chemistry to biosensors. We have constructed silicon field effect devices based upon silicon-on-insulator (SOI) technology in our lab [63,64] with 30-nm silicon thickness, 2-mm device width, and 20-mm device length. A bright-field top-view micrograph of a device is displayed in Figure 6 (top left).…”
Section: Full Papermentioning
confidence: 99%
“…Further advances of these technologies require the ability to integrate additional elements, such as the miniaturized heating element described here, and the ability to integrate heating elements in a massively parallel format compatible with silicon technology (26). Notably, our miniaturized heaters could also function as dual heater/sensor elements, as these SOI nanowire or nanoribbon structures have been used to detect DNA, proteins, pH, and pyrophosphates (27)(28)(29)(30)(31).…”
Section: Discussionmentioning
confidence: 99%