Nanoscale structural damage due to focused ion beam milling of silicon with Ga ions

Salvati, Enrico; Brandt, León Romano; Papadaki, Chrysanthi; Zhang, H.; Mousavi, Seyed Morteza; Wermeille, D.; Korsunsky, Alexander M.

doi:10.1016/j.matlet.2017.11.043

Cited by 44 publications

(18 citation statements)

References 11 publications

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“…At this point, it is important to comment on the effect of FIB-milling damage on the metamaterial geometry. As reported in the pertinent literature [19,45,53], the layer affected by the FIB can span from a few to several nanometres in terms of thickness. In particular, it has been experimentally observed and simulated that for very small grazing angles of the ion beam (e.g.…”

Section: Resultsmentioning

confidence: 91%

“…In particular, it has been experimentally observed and simulated that for very small grazing angles of the ion beam (e.g. 10°), the damaged layer is generally thinner than ~30 nm [45,54]. Although this dimension is rather limited, it is important to note that it is approximately one tenth of the in-plane separation distance (300 nm) and therefore, being 20% of the total joint thickness, may have an impact on the elastic behaviour of the entire metamaterial structure.…”

Section: Resultsmentioning

confidence: 99%

“…However, reproducing these geometries with nanoscale lattice parameters presents a number of difficult challenges from both a design and fabrication viewpoint. For example, residual stress effects during FIB-milling make the precise fabrication of structures with thin, slender ligaments extremely difficult [31,45]. Another factor is that in order for a 2D auxetic system to deform in a predominantly in-plane manner and hence exploit its full auxetic potential, the depth dimension of the system must be of sufficient thickness to avoid out-of-plane deformations.…”

Section: Introductionmentioning

confidence: 99%

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2D auxetic metamaterials with tuneable micro-/nanoscale apertures

Mizzi

Salvati

Spaggiari

et al. 2020

Applied Materials Today

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Modern advanced manufacturing technologies have made possible the tailored design and fabrication of complex nanoscale architectures with anomalous and enhanced properties, including mechanical and optical metamaterials; structured materials which are able to exhibit unusual mechanical and optical properties that are derived from their geometry rather than their intrinsic material properties. In this work, we fabricated for the first time an ultrathin 2D auxetic metamaterial with nanoscale geometric features specifically designed to deform in-plane by using focused-ion-beam milling to introduce patterned nano-slits within a thin membrane. The system was mechanically loaded in-situ and exhibited in-plane dominated deformation up to 5% tensile strain and a Poisson's ratio of-0.78. Furthermore, the porosity and aperture shape of the metamaterial have been shown to change considerably upon the application of strain, with pore dimensions showing a fourfold increase at 5% strain. This mechanically-controlled tuneability makes this metamaterial system an ideal candidate for use as a reconfigurable nanofilter or a nano light-modulator.

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Section: Resultsmentioning

confidence: 91%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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2D auxetic metamaterials with tuneable micro-/nanoscale apertures

Mizzi

Salvati

Spaggiari

et al. 2020

Applied Materials Today

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“…The aim of this operation was to control and reduce the degree of pillar tapering and barrelling, and to reduce the damaged “skin layer” of the micro-pillar samples. This layer arises as a consequence of ion beam damage due to Ga + ions penetrating the material surface, causing a cascade of atomic displacements, creating a population of defects and leading to material amorphisation [ 21 ]. This effect has been the subject of a number of recent studies that have primarily focused on silicon, although other materials have also been considered [ 13 , 14 ].…”

Section: Experimental Methodsmentioning

confidence: 99%

Nanoscale Origins of the Size Effect in the Compression Response of Single Crystal Ni-Base Superalloy Micro-Pillars

et al. 2018

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Nickel superalloys play a pivotal role in enabling power-generation devices on land, sea, and in the air. They derive their strength from coherent cuboidal precipitates of the ordered γ’ phase that is different from the γ matrix in composition, structure and properties. In order to reveal the correlation between elemental distribution, dislocation glide and the plastic deformation of micro- and nano-sized volumes of a nickel superalloy, a combined in situ nanoindentation compression study was carried out with a scanning electron microscope (SEM) on micro- and nano-pillars fabricated by focused ion beam (FIB) milling of Ni-base superalloy CMSX4. The observed mechanical response (hardening followed by softening) was correlated with the progression of crystal slip that was revealed using FIB nano-tomography and energy-dispersive spectroscopy (EDS) elemental mapping. A hypothesis was put forward that the dependence of material strength on the size of the sample (micropillar diameter) is correlated with the characteristic dimension of the structural units (γ’ precipitates). By proposing two new dislocation-based models, the results were found to be described well by a new parameter-free Hall–Petch equation.

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“…В ряде случаев такая обработка действительно слабо сказывается на механических свойствах материала. Однако в ряде случаев, особенно при D < 1 µm, последствия имплантации ионов, бомбардирующих поверхность, и ее аморфизация требуют дополнительного изучения, обсуждения и учета [130][131][132][133][134]. Для уменьшения возможных повреждений материала обычно ток в FIB снижают в процессе перехода от грубой ускоренной резки к финишной по-лировке поверхности образца с ∼ 10 nA до ∼ 0.1 nA, а иногда и до 0.01 nA.…”

Section: In Situ исследования механических свойств и динамики структуunclassified

Наноиндентирование И Механические Свойства Материалов В Субмикро- И Наношкале. Недавние Результаты И Достижения (О Б З О Р)

Головин¹

2021

Физика Твердого Тела

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The review discusses the details of various materials mechanical behavior in submicro- and nanoscale. Significant advances in this scope result from the development of wide family of load based precise nanotesting techniques called nanoindentation. But nowadays, nanomechanical properties are studied not only by nanoindentation techniques in narrow sense, i.e. local loading of macro, micro and nanoscale objects. Nanomechanical load testing is discussed here within a wider scope employing precise deformation measurement with nanometer scale resolution caused by various types of low load application to the object under study including uniaxial compression or extension, shearing, bending or twisting, optionally accompanied by in situ monitoring sample microstructure using scanning and transmission electron microscopy and Laue microdiffraction technique. The main courses of experimental techniques development in recent ten years along with the results obtained using them in single, poly and nano crystalline materials, composites, films and coatings, amorphous solids and such biomaterials as tissues, living cells and macromolecules are described. Special attention is paid to deformation size effects and atomic mechanisms in nanoscale. This review is a natural continuation and development of the review published at Fiz.Tverd.Tela vol.50, issue 12, 2008 of the same author that discusses details of nanomechanical properties of solids. Current review includes wider range of nanomechanical testing concepts and recent achievements in the scope. The work was supported by RFBR grant for project #19-12-50235.

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Nanoscale structural damage due to focused ion beam milling of silicon with Ga ions

Cited by 44 publications

References 11 publications

2D auxetic metamaterials with tuneable micro-/nanoscale apertures

2D auxetic metamaterials with tuneable micro-/nanoscale apertures

Nanoscale Origins of the Size Effect in the Compression Response of Single Crystal Ni-Base Superalloy Micro-Pillars

Наноиндентирование И Механические Свойства Материалов В Субмикро- И Наношкале. Недавние Результаты И Достижения (О Б З О Р)

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