2021
DOI: 10.1002/admi.202100529
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Nanoscale Probing of Surface Charges in Functional Copper‐Metal Organic Clusters by Kelvin Probe Force Microscopy for Field‐Effect Transistors

Abstract: Metal–organic frameworks (MOFs) have recently attracted a great deal of attention especially as conceivable advanced gate dielectrics for next‐generation field‐effect transistors (FETs) and memory device applications. Dielectric surface charge retention mapping is essential for gauging the leakage current and threshold voltage stability. Due to a dearth of systematic real‐time surface charge probing of MOFs dielectrics, in this work, the nanoscale Kelvin probe force microscopy (KPFM) technique is employed for … Show more

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“…Then, the surface potential distributions of trapped charges can be visualized by KPFM. KPFM has been employed for detecting the localized electrical properties (such as surface potential, work function, charge trapping, and charge recombination) of materials and devices at nanometer scale by scanning the electrostatic force between the AFM tip and the sample surface. Recently, there also are many reports on the application of KPFM to the study of two-dimensional nanostructures. , In our experiments, KPFM is conducted by a dual pass process with amplitude modulation as shown in Figure a . At the first scan, the topography is scanned in the tapping mode.…”
mentioning
confidence: 99%
“…Then, the surface potential distributions of trapped charges can be visualized by KPFM. KPFM has been employed for detecting the localized electrical properties (such as surface potential, work function, charge trapping, and charge recombination) of materials and devices at nanometer scale by scanning the electrostatic force between the AFM tip and the sample surface. Recently, there also are many reports on the application of KPFM to the study of two-dimensional nanostructures. , In our experiments, KPFM is conducted by a dual pass process with amplitude modulation as shown in Figure a . At the first scan, the topography is scanned in the tapping mode.…”
mentioning
confidence: 99%