Nanoscale-Patterned Cr Films by Selective Etching Using a Heat-Mode Resist: Implications for X-ray Beam Splitter

Abstract

Nanoscale-patterned chromium (Cr) metal structures are widely used in a large variety of semiconductor processing fields. These structures are usually fabricated via the direct etching method. Owing to the drawbacks of traditional lithography techniques (such as electron beam, ion beam, and scanning probe lithography), it is still a high-cost and complex work to accomplish nanoscale structure fabrication. In this paper, through laser heat-mode lithography, a chalcogenide AgInSbTe (AIST) film is chosen as the dry-etching resist to fabricate a series of arbitrary micro/nanostructures on the Cr film. The etching mechanism from the AIST resist to the Cr mask under the Cl2/O2-based gases has been elucidated through energy-dispersive X-ray spectrometer (EDS), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. A grating pattern with a minimum pitch of 300 nm has been achieved on the Cr mask, and successfully transferred onto a diamond substrate as an X-ray beam splitter. This work provides an effective method for nanoscale structure fabrication and clarifies the antietching mechanisms of AIST resist films under Cl-based plasma etching.

Mechanism of Corrosion Selectivity of NSb2Te Thin Films in the H3PO4/HNO3 Developer for Direct Laser Writing Nanolithography

“…So far, various heat-mode resists have been investigated such as metallic glass, , polymeric photoresist, and copper–hydrazone–complex thin films . Among others, the SbTe phase change thin film, as a heat-mode resist, is a promising candidate owing to the simple fabrication procedure and clear phase change thermal threshold. − Currently, Wang et al successfully achieved multiscale structural fabrication with the feature size from 90 nm to 2.7 μm in the AgInSbTe resist. A high corrosion selectivity of 30:1 and high-resolution nanostructures with a minimum feature size of 41 nm are further obtained in the same resist via an electrochemical strategy .…”

Fabrication of photoluminescent nanoparticles from carbazole-derived chalcones: a study of optical properties, cell biomarking, and metabolism

“…34,35 Recently, nanoparticles of compounds derived from carbazole have been manufactured, which have allowed for improving selectivity and biocompatibility with the biological system. 36,37 The use of organic fluorophores for photodynamic therapy involves the evaluation of the optical and toxicological properties. For this reason, manufacturing methods of luminescent organic nanoparticles coated with a biocompatible material have been reported using techniques such as microemulsion and reprecipitation, where the optical properties have been preserved, and biocompatibility has improved.…”