2002
DOI: 10.1021/ja017673h
|View full text |Cite
|
Sign up to set email alerts
|

Nanoscale Molecular Patterns Fabricated by Using Scanning Near-Field Optical Lithography

Abstract: Nanometer-scale patterns have been created in self-assembled monolayers by using a scanning near-field optical microscope coupled to an ultra-violet laser emitting light at a wavelength of 244 nm. Sharp, chemically well-defined features with dimensions as small as 40 nm have been created routinely, and on occasions line widths of 25 nm (lambda/10) have been achieved. Because of the wide range of photochemical methods available for surface derivatization, this approach promises to provide a flexible and versati… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

2
125
0
1

Year Published

2002
2002
2012
2012

Publication Types

Select...
5
4

Relationship

2
7

Authors

Journals

citations
Cited by 132 publications
(128 citation statements)
references
References 23 publications
2
125
0
1
Order By: Relevance
“…The conditions need to be optimised each time the tip is replaced. The 40 nm line presented is the smallest FHMW measured for a UV deprotection SAM to date and compares well to SNOM patterning using deep UV light [57][58][59].…”
Section: Nanoscale Patterningsupporting
confidence: 58%
“…The conditions need to be optimised each time the tip is replaced. The 40 nm line presented is the smallest FHMW measured for a UV deprotection SAM to date and compares well to SNOM patterning using deep UV light [57][58][59].…”
Section: Nanoscale Patterningsupporting
confidence: 58%
“…9͒ and self-assembled monolayers of oligo͑ethylene glycol͒ terminated alkanethiolates. [10][11][12] However, polymer patterning is difficult on small length scales, and while self-assembled monolayers of alkanethiolates, [13][14][15][16][17][18][19] alkylsiloxanes, [20][21][22] and alkylphosphonates [23][24][25][26] have been patterned by a variety of methods, they are not without problems. Alkanethiolate selfassembled monolayers ͑SAMs͒ are rarely defect-free and exhibit limited oxidative stability, while siloxane films exhibit low degrees of order.…”
Section: Introductionmentioning
confidence: 99%
“…[9] Recently, there has been extensive research into methods for pattern generation based on self-assembled monolayers (SAMs), because patterned SAMs can not only be used as masks [10] or templates [11,12] to construct nanostructures, but can also be used, in combination with other instruments and techniques, to fabricate nanomaterials. Based on the above concept, a series of methods has been developed to fabricate patterned, self-assembled monolayers, including soft lithography (or microcontact printing), [13] dip-pen-nanolithography, [14] nearfield optical lithography, [15] scanning probe lithography, [16,17] and others.…”
mentioning
confidence: 99%