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2010
DOI: 10.1364/oe.18.014159
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Nanoscale imaging using deep ultraviolet digital holographic microscopy

Abstract: A deep ultraviolet off-axis digital holographic microscope (DHM) is presented. The microscope has been arranged with as least as possible optical elements in the imaging path to avoid aberration due to the non-perfect optical elements. A high resolution approach has been implemented in the setup using oblique illumination to overcome the limitation introduced by the optical system. To examine the resolution of the system a nano-structured template has been designed and the result confirms the submicron and nan… Show more

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Cited by 84 publications
(33 citation statements)
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“…One can use illuminating beams hitting the sample at user specified angle [23], see Figure 2 for a schematic illustration of this approach. One can also imagine having multiple simultaneous oblique illuminations.…”
Section: Structured Illuminationmentioning
confidence: 99%
“…One can use illuminating beams hitting the sample at user specified angle [23], see Figure 2 for a schematic illustration of this approach. One can also imagine having multiple simultaneous oblique illuminations.…”
Section: Structured Illuminationmentioning
confidence: 99%
“…In addition, the combination of DHM and phase shifting Interferometry are used to characterize optical fibers, optical waveguides and the induced refractive index profile of bent optical fibers 12,13,14,15,16 . Off-axis DHM using a deep ultraviolet wavelength has been confirmed to give resolution in the submicron and nanoscale range 17 .…”
Section: Introductionmentioning
confidence: 97%
“…Besides (digital) holography/interferometry, [1][2][3] where the phase can be recorded by superposition of the incident object light wave with a reference wave, there are phase retrieval methods which work without interference, just by recording the measurable intensity. The most applied approach was already published in 1972 by Gerchberg and Saxton 4 and is based on an iterative algorithm.…”
Section: Introductionmentioning
confidence: 99%