Nanoscale hybrid manufacturing process by nano particle deposition system (NPDS) and focused ion beam (FIB)

Ahn, Sung‐Hoon; Chun, Doo‐Man; Kim, C.S.

doi:10.1016/j.cirp.2011.03.071

Cited by 31 publications

(17 citation statements)

References 14 publications

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“…Details of this hybrid process are given in the following section. Table 1(e) shows a structure fabricated using nanoscale 3D printing [9]. Using this process, small features were fabricated (a few tens of nanometers), and multiple materials could be printed.…”

Section: Micro Contact Printingmentioning

confidence: 99%

“…A hybrid process reported by Prof. Ahn's group is also included in this category [9]. This process consists of additive nanoparticle printing and subtractive ion beam milling.…”

Section: Micro Contact Printingmentioning

confidence: 99%

“…In one existing hybrid process [9], fabrication techniques were combined, resulting in significant improvements compared with conventional fabrication techniques.…”

Section: List Of Tablesmentioning

confidence: 99%

“…Full 3D Hybrid NPDS+FIB process To achieve 3D printing at the micro/nanoscale with multiple materials, a hybrid process had been reported, which integrates NPDS with FIB milling [9]. NPDS can enable the deposition of thin films using accelerated aerosolized nanoparticles [29], which impact on and adhere to a substrate [30].…”

Section: Full 3dmentioning

confidence: 99%

“…(e) Three-dimensional strcuture fabricated using nanoscale 3D printing [9] In particular, associated with the demands of fabrication and assembly of micro/nanoscale components [28], combining the advantages of different fabrication techniques is highly desirable. Here we describe a novel hybrid process for 3D printing at the micro/nanoscale with multi-material capabilities.…”

Section: Micro Contact Printingmentioning

confidence: 99%

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Hybrid 3D printing by bridging micro/nano processes

Yoon

Jang

Kim

et al. 2017

J. Micromech. Microeng.

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The aim of this work was to develop a novel hybrid manufacturing method for nanoscale three-dimensional (3D) printing with multi-material capabilities. 3D structuring methods at the micro/nanoscale are major goals of various engineering fields, and much work has been carried out to improve the minimum feature size, geometrical complexity, and material selection. With the aim of nanoscale multimaterial printing, a hybrid process was reported with an integrated nanoparticle deposition system (NPDS) and focused ion beam (FIB) system; however this process has limitations in terms of surface roughness and control over the layer thickness, as well as with the process scale, and furthermore, lack of sacrificial layers.In this dissertation, a novel hybrid process is described, which combines aerodynamically focused nanoparticle (AFN) printing, micro-machining and focused ion beam (FIB) milling. AFN printing is based on NPDS, and micromachining was used for local planarization. In addition to these processes, spincoating was used to fabricate sacrificial layers. By bridging these different II micro/nanoscale processes, the resulting hybrid process can address the limitations of the individual processes.To create the hybrid process, each process was investigated to enable compatibility. With the AFN printing system, the surface morphology of a detached substrate was observed, and the bonding mechanism between the substrate and nanoparticles was investigated. A novel printing strategy was identified to reduce the scale of the process. With the micro-machining system, different tool geometries were investigated. Complex geometries inspired by conventional-scale tools were implemented on the micro-scale, and their effects were investigated. With the FIB system, material re-deposition phenomena were investigated to reduce defects that occur during ion sputtering. A novel path-generation strategy was identified and investigated for different scanning paths.Process capability is discussed using fabrication examples and functional applications. The novel hybrid process represents a significant advance in the state of the art, and enables far improved process scales or dimensional degree of freedom, without losing the advantages of broad choice of materials.3D-pinted micro bi-material cantilevers were fabricated as a thermal actuator.The mechanical and thermal properties of the structure were investigated using an in-situ measurement system, and irregular thermal phenomena were analyzed. It is expected that these in-situ measurements of the 3D printed microstructure will contribute to materials research.Various 3D structures can be fabricated using the process described here from a range of metal/ceramic inorganic materials, including polymers. In particular, it is expected that the process will contribute to the area of customized nanoscale structuring, with potential applications in medical treatments. It is also expected that this work will contribute to further improvements in manufacturing technology by combining different m...

show abstract

Section: Micro Contact Printingmentioning

confidence: 99%

“…A hybrid process reported by Prof. Ahn's group is also included in this category [9]. This process consists of additive nanoparticle printing and subtractive ion beam milling.…”

Section: Micro Contact Printingmentioning

confidence: 99%

“…In one existing hybrid process [9], fabrication techniques were combined, resulting in significant improvements compared with conventional fabrication techniques.…”

Section: List Of Tablesmentioning

confidence: 99%

Section: Full 3dmentioning

confidence: 99%

Section: Micro Contact Printingmentioning

confidence: 99%

See 3 more Smart Citations

Hybrid 3D printing by bridging micro/nano processes

Yoon

Jang

Kim

et al. 2017

J. Micromech. Microeng.

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Laminated Object Manufacturing of Ceramic‐Based Materials

2020

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Since their inception, additive manufacturing (AM) techniques have been the go‐to methods for obtaining highly complex‐shaped rapid prototypes (RPs) and specialized parts, which were produced in small lot sizes. The AM technique of laminated object manufacturing (LOM) is an immensely convenient and cost‐effective method for quickly producing millimeter‐sized to meter‐sized parts, while incorporating micrometer‐sized constructive features. LOM machines offer an open work space, within which nontoxic and highly filled sheet materials can be processed at a high production velocity. The unique property profile of ceramic‐based materials from LOM may be indispensable for applications calling for materials that unite high temperature resistance, mechanical strength, and light weight. Optionally, local material functionalization may engender the electrical conductivity, chemical stability, ferroelectricity, radiation shielding, or filter membrane stability of a limited portion of the material. Herein, a detailed evaluation of the applicability of LOM in the near net shaping ceramic‐based materials is presented. Optional technical adjustments for the LOM process and extensions of the LOM machine configuration can improve the economic feasibility its operation. Previously successful LOM‐printed ceramic‐based materials are showcased within a comprehensive overview on the state of the art and potential novel composite materials are presented.

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Mist Chemical Vapor Deposition Using Poorly Soluble Particles as Raw Material

Yamazaki,

Nakamura,

Kato

et al. 2024

Cryst. Res. Technol.

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Mist chemical vapor deposition (mist‐CVD) is expected to be a potentially low‐environment‐impact and low‐cost crystal growth technique. With mist‐CVD, soluble materials are usually selected as raw materials, and mist is usually generated from an aqueous solution including raw materials. However, any substances to be included in the mist can be potentially supplied as raw materials. Namely, there is no need for the substances to be dissolved in some solvent. Therefore, as a trial, it is demonstrated that mist including poorly soluble particles are used as raw materials for mist‐CVD crystal growth.

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Nanoscale hybrid manufacturing process by nano particle deposition system (NPDS) and focused ion beam (FIB)

Cited by 31 publications

References 14 publications

Hybrid 3D printing by bridging micro/nano processes

Hybrid 3D printing by bridging micro/nano processes

Laminated Object Manufacturing of Ceramic‐Based Materials

Mist Chemical Vapor Deposition Using Poorly Soluble Particles as Raw Material

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