The relationship between magnetic phase transition temperatures (Curie temperature: T c , ferromagnetic antiferromagnetic transition temperature: T 0 ) and lattice distortions in L1 0 FePt 1-x Rh x thin films (6 nm thick) were studied. Thin film depositions on varied substrates modifies lattice constants due to misfits between substrates and films, as well as residual stresses caused by rapid thermal annealing. Both epitaxially grown FePtRh thin films on MgO(001) substrate and nonepitaxially grown FePtRh thin films on SiO 2 substrate exhibited the (001) oriented L1 0 structure. The MgO/FePtRh films and the SiO 2 /FePtRh films had the almost constant a values of 0.383 nm (1.0 of compressive strain to the FePtRh bulks) and 0.390 nm (0.8 of tensile strain to the FePtRh bulks) in average respectively, whereas the c values decreased with the Rh composition (x ). The c axis distortion in both the MgO/FePtRh films and the SiO 2 /FePtRh films were the tensile strain in 0.25<x, and the strain values were 1.2 and 0.6, respectively. T c decreased with x in all of the samples (MgO/FePtRh films, SiO 2 /FePtRh films, and FePtRh bulks), and the reduction rates strongly depended on the c values rather than values of a or x. T 0 increased with x in all of the samples, and the incremental rates also strongly depended on the c values. [doi:10.2320/jinstmet.JAW201501] (Received April 14, 2015; Accepted May 7, 2015; Published September 1, 2015) Keywords: iron platinum, ordered alloy, thin film, magnetic phase transition, curie temperature, lattice distortion